Inventor · disambiguated record
Marco Kluse
Also filed as: KLUSE MARCO L · KLUSE MARCO LE
1 granted patent·1 pending application·7 citations·filing 2005–2005
29Inventor score
Files withASML NETHERLANDS BV2
Top patents by PatentIndex Score
2 records- 0179US7514186B2System for electrically connecting a mask to earth, a maskASML NETHERLANDS BV·Filed 2005·Granted Apr 7, 2009·7 cites·20 claims
- 0244US2007139855A1Lithographic apparatus and method of manufacturing an electrostatic clamp for a lithographic apparatusASML NETHERLANDS BV·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →