Inventor · disambiguated record
Tsutomu Okabe
Also filed as: OKABE TSUTOMU
47 granted patents·6 pending applications·641 citations·filing 1992–2021
98Inventor score
Top patents by PatentIndex Score
53 records- 0196US7841371B2Lid opening/closing system of an airtight containerTDK CORP·Filed 2006·Granted Nov 30, 2010·31 cites·7 claims
- 0296US7789609B2Lid opening/closing system for closed container and substrate processing method using sameTDK CORP·Filed 2008·Granted Sep 7, 2010·41 cites·12 claims
- 0395US8082955B2Lid opening/closing system of an airtight containerOKABE TSUTOMU·Filed 2010·Granted Dec 27, 2011·17 cites·7 claims
- 0495US7726353B2Lid opening/closing system of an airtight containerTDK CORP·Filed 2006·Granted Jun 1, 2010·37 cites·5 claims
- 0594US8522836B2Substrate storage pod with replacement function of clean gasOKABE TSUTOMU·Filed 2011·Granted Sep 3, 2013·18 cites·8 claims
- 0692US8302637B2Method of processing an object in a container and lid opening/closing system used in the methodOKABE TSUTOMU·Filed 2008·Granted Nov 6, 2012·27 cites·7 claims
- 0792US8186927B2Contained object transfer systemOKABE TSUTOMU·Filed 2009·Granted May 29, 2012·20 cites·6 claims
- 0889US8171964B2Apparatus and method for opening/closing lid of closed container, gas replacement apparatus using same, and load port apparatusOKABE TSUTOMU·Filed 2009·Granted May 8, 2012·15 cites·3 claims
- 0988US8061738B2Gas replacement systemOKABE TSUTOMU·Filed 2009·Granted Nov 22, 2011·12 cites·1 claims
- 1087US8893753B2Substrate storage pod and lid member thereof, and processing apparatus for a substrateOKABE TSUTOMU·Filed 2011·Granted Nov 25, 2014·8 cites·12 claims
- 1187US5841893AInspection data analyzing systemHITACHI LTD·Filed 1992·Granted Nov 24, 1998·76 cites·12 claims
- 1285US7379174B2Wafer detecting deviceTDK CORP·Filed 2005·Granted May 27, 2008·11 cites·5 claims
- 1385US6796763B2Clean box, clean transfer method and systemTDK CORP·Filed 2003·Granted Sep 28, 2004·29 cites·10 claims
- 1485US6390145B1Container and method for sealing the containerTDK CORP·Filed 2000·Granted May 21, 2002·34 cites·6 claims
- 1584US8413693B2Lid opening/closing system of an airtight containerOKABE TSUTOMU·Filed 2012·Granted Apr 9, 2013·4 cites·2 claims
- 1684US8375998B2Lid opening/closing system of an airtight containerTDK CORP·Filed 2011·Granted Feb 19, 2013·4 cites·5 claims
- 1783US6984839B2Wafer processing apparatus capable of mapping wafersTDK CORP·Filed 2002·Granted Jan 10, 2006·25 cites·20 claims
- 1878US11133208B2EFEM and method of introducing dry air thereintoTDK CORP·Filed 2018·Granted Sep 28, 2021·2 cites·18 claims
- 1978US6641349B1Clean box, clean transfer method and systemTDK CORP·Filed 1999·Granted Nov 4, 2003·44 cites·20 claims
- 2077US8876173B2Substrate storage pod and lid opening/closing system for the sameIGARASHI HIROSHI·Filed 2011·Granted Nov 4, 2014·4 cites·11 claims
- 2177US6883770B1Load port mounting mechanismTDK CORP·Filed 2000·Granted Apr 26, 2005·20 cites·17 claims
- 2274US11049736B2Circulating EFEMTDK CORP·Filed 2019·Granted Jun 29, 2021·1 cites·9 claims
- 2374US10304702B2EfemTDK CORP·Filed 2016·Granted May 28, 2019·2 cites·14 claims
- 2474US6330352B1Inspection data analyzing systemHITACHI LTD·Filed 2000·Granted Dec 11, 2001·11 cites·2 claims
- 2572US6628817B2Inspection data analyzing systemHITACHI LTD·Filed 2001·Granted Sep 30, 2003·9 cites·25 claims
- 2671US6529619B2Inspection data analyzing systemHITACHI LTD·Filed 2001·Granted Mar 4, 2003·9 cites·3 claims
- 2771US6338604B1Lid latch mechanism for clean boxTDK CORP·Filed 2000·Granted Jan 15, 2002·13 cites·11 claims
- 2871US5497331ASemiconductor integrated circuit device fabrication method and its fabrication apparatusHITACHI LTD·Filed 1994·Granted Mar 5, 1996·46 cites·8 claims
- 2970US9349627B2Lid opening/closing system for closed container and substrate processing method using sameOKABE TSUTOMU·Filed 2010·Granted May 24, 2016·2 cites·6 claims
- 3068US7621714B2Pod clamping unit in pod opener, pod corresponding to pod clamping unit, and clamping mechanism and clamping method using pod clamping unitTDK CORP·Filed 2004·Granted Nov 24, 2009·11 cites·1 claims
- 3168US6339653B1Inspection data analyzing systemHITACHI LTD·Filed 2000·Granted Jan 15, 2002·7 cites·12 claims
- 3267US11515177B2Circulating EFEMTDK CORP·Filed 2021·Granted Nov 29, 2022·0 cites·9 claims
- 3367US8657346B2Lid opening/closing system for closed containerOKABE TSUTOMU·Filed 2009·Granted Feb 25, 2014·2 cites·14 claims
- 3467US8322759B2Closed container and lid opening/closing system thereforOKABE TSUTOMU·Filed 2009·Granted Dec 4, 2012·4 cites·9 claims
- 3565US10340157B2Mini-environment apparatusTDK CORP·Filed 2016·Granted Jul 2, 2019·1 cites·10 claims
- 3664US10090182B2Load port device and cleaning gas introducing method into a container on a load portTDK CORP·Filed 2016·Granted Oct 2, 2018·1 cites·8 claims
- 3764US7360985B2Wafer processing apparatus including clean box stopping mechanismTDK CORP·Filed 2002·Granted Apr 22, 2008·8 cites·2 claims
- 3862US8083456B2Contained object transfer systemOKABE TSUTOMU·Filed 2008·Granted Dec 27, 2011·1 cites·7 claims
- 3961US7670095B2Wafer processing apparatus having dust proof functionTDK CORP·Filed 2002·Granted Mar 2, 2010·6 cites·17 claims
- 4061US7607880B2Wafer processing apparatus having dust proof functionTDK CORP·Filed 2003·Granted Oct 27, 2009·6 cites·10 claims
- 4159US6185322B1Inspection system and method using separate processors for processing different information regarding a workpiece such as an electronic deviceHITACHI LTD·Filed 1997·Granted Feb 6, 2001·15 cites·14 claims
- 4256US7537425B2Wafer processing apparatus having dust proof functionTDK CORP·Filed 2003·Granted May 26, 2009·4 cites·5 claims
- 4355US2007210533A1Interface sealTDK CORP·Filed 2007·Application pending·0 cites
- 4453US7614840B2Wafer processing apparatus having dust proof functionTDK CORP·Filed 2003·Granted Nov 10, 2009·3 cites·7 claims
- 4549US8528947B2Closed container and lid opening/closing system thereforIGARASHI HIROSHI·Filed 2009·Granted Sep 10, 2013·0 cites·17 claims
- 4644US2006288664A1Purge system for a product container and table for use in the purge systemTDK CORP·Filed 2006·Application pending·0 cites
- 4743US2004099826A1Wafer processing apparatus capable of mapping wafersTDK CORP·Filed 2003·Application pending·0 cites
- 4843US2004127048A1Wafer processing apparatus including clean box stopping mechanismTDK CORP·Filed 2003·Application pending·0 cites
- 4942US11145529B2EFEM and method of introducing replacement gas thereintoTDK CORP·Filed 2018·Granted Oct 12, 2021·0 cites·3 claims
- 5042US9401295B2Load port apparatus and clamping device to be used for the sameOKABE TSUTOMU·Filed 2012·Granted Jul 26, 2016·0 cites·10 claims
Showing the top 50 of 53 patent records by PatentIndex Score.
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