Inventor · disambiguated record
Panyin Hughes
Also filed as: HUGHES PANYIN
2 granted patents·30 citations·filing 2002–2002
61Inventor score
Technology areasH01J
Files withAPPLIED MATERIALS INC2
Top patents by PatentIndex Score
2 records- 0183US7374636B2Method and apparatus for providing uniform plasma in a magnetic field enhanced plasma reactorAPPLIED MATERIALS INC·Filed 2002·Granted May 20, 2008·21 cites·16 claims
- 0271US7316199B2Method and apparatus for controlling the magnetic field intensity in a plasma enhanced semiconductor wafer processing chamberAPPLIED MATERIALS INC·Filed 2002·Granted Jan 8, 2008·9 cites·11 claims
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