Inventor · disambiguated record
Yoshihisa Kase
Also filed as: KASE YOSHIHISA
3 granted patents·1 pending application·0 citations·filing 2009–2014
43Inventor score
Top patents by PatentIndex Score
4 records- 0151US9507251B2Method for manufacturing reflective mask and apparatus for manufacturing reflective maskSHIBAURA MECHATRONICS CORP·Filed 2014·Granted Nov 29, 2016·0 cites·10 claims
- 0244US2011092073A1Plasma processing apparatus, plasma processing method, and method for manufacturing electronic deviceSHIBAURA MECHATRONICS CORP·Filed 2009·Application pending·0 cites
- 0339US10111313B2Plasma processing apparatus and plasma processing methodSHIBAURA MECHATRONICS CORP·Filed 2013·Granted Oct 23, 2018·0 cites·9 claims
- 0439US8702901B2Method for manufacturing reflective mask and apparatus for manufacturing reflective maskYOSHIMORI TOMOAKI·Filed 2011·Granted Apr 22, 2014·0 cites·12 claims
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