Inventor · disambiguated record
Toshiei Kurosaki
Also filed as: KUROSAKI TOSHIEI
30 granted patents·3 pending applications·2,486 citations·filing 1976–2008
98Inventor score
Top patents by PatentIndex Score
33 records- 0197US4480910APattern forming apparatusHITACHI LTD·Filed 1982·Granted Nov 6, 1984·1.5k cites·15 claims
- 0296US4869999AMethod of forming pattern and projection aligner for carrying out the sameHITACHI LTD·Filed 1987·Granted Sep 26, 1989·81 cites·9 claims
- 0392US4983039ASpectrometerHITACHI LTD·Filed 1989·Granted Jan 8, 1991·66 cites·32 claims
- 0491US7113628B1Defect image classifying method and apparatus and a semiconductor device manufacturing process based on the method and apparatusHITACHI LTD·Filed 2000·Granted Sep 26, 2006·54 cites·3 claims
- 0591US5235400AMethod of and apparatus for detecting defect on photomaskHITACHI LTD·Filed 1989·Granted Aug 10, 1993·77 cites·18 claims
- 0691US4904569AMethod of forming pattern and projection aligner for carrying out the sameHITACHI LTD·Filed 1988·Granted Feb 27, 1990·64 cites·5 claims
- 0791US4057347AOptical exposure apparatusHITACHI LTD·Filed 1976·Granted Nov 8, 1977·56 cites·5 claims
- 0890US4441206APattern detecting apparatusHITACHI LTD·Filed 1981·Granted Apr 3, 1984·79 cites·3 claims
- 0989US6476388B1Scanning electron microscope having magnification switching controlHITACHI LTD·Filed 1999·Granted Nov 5, 2002·95 cites·9 claims
- 1088US6792359B2Method for inspecting defect and system thereforHITACHI LTD·Filed 2001·Granted Sep 14, 2004·29 cites·16 claims
- 1188US6765205B2Electron microscope including apparatus for X-ray analysis and method of analyzing specimens using sameHITACHI HIGH TECH CORP·Filed 2003·Granted Jul 20, 2004·37 cites·2 claims
- 1288US4992825AMethod of forming pattern and projection aligner for carrying out the sameHITACHI LTD·Filed 1989·Granted Feb 12, 1991·39 cites·13 claims
- 1385US4798470APattern printing method and apparatusHITACHI LTD·Filed 1986·Granted Jan 17, 1989·37 cites·9 claims
- 1482US4614432APattern detectorHITACHI LTD·Filed 1983·Granted Sep 30, 1986·32 cites·16 claims
- 1578US6553323B1Method and its apparatus for inspecting a specimenHITACHI LTD·Filed 2000·Granted Apr 22, 2003·21 cites·24 claims
- 1674US4857744AOptical projection printing apparatus wherein wafer mark has a grating pitch in the sagittal plane of the first optical systemHITACHI LTD·Filed 1988·Granted Aug 15, 1989·22 cites·12 claims
- 1773US4504726APattern generatorHITACHI LTD·Filed 1981·Granted Mar 12, 1985·35 cites·5 claims
- 1872US5747816ACharged particle beam apparatusHITACHI LTD·Filed 1996·Granted May 5, 1998·24 cites·18 claims
- 1964US7010447B2Method for inspecting defect and system thereforHITACHI LTD·Filed 2004·Granted Mar 7, 2006·6 cites·2 claims
- 2063US5247329AProjection type exposure method and apparatusHITACHI LTD·Filed 1991·Granted Sep 21, 1993·19 cites·9 claims
- 2161USRE36731EMethod of forming pattern and projection aligner for carrying out the sameHITACHI LTD·Filed 1994·Granted Jun 13, 2000·12 cites·14 claims
- 2257US7558683B2Method for inspecting defect and system thereforHITACHI LTD·Filed 2007·Granted Jul 7, 2009·0 cites·4 claims
- 2353US7305314B2Method for inspecting defect and system thereforHITACHI LTD·Filed 2005·Granted Dec 4, 2007·0 cites·4 claims
- 2451US5078495AMonochromatorHITACHI LTD·Filed 1990·Granted Jan 7, 1992·16 cites·7 claims
- 2550US5392115AMethod of detecting inclination of a specimen and a projection exposure device as well as method of detecting period of periodically varying signalHITACHI LTD·Filed 1992·Granted Feb 21, 1995·10 cites·9 claims
- 2649US2008187212A1Defect Image Classifying Method and Apparatus and a Semiconductor Device Manufacturing Process Based on the Method and ApparatusHITACHI LTD·Filed 2008·Application pending·0 cites
- 2749US2005122508A1Method and apparatus for reviewing defectsFiled 2004·Application pending·0 cites
- 2848US7356177B2Defect image classifying method and apparatus and a semiconductor device manufacturing process based on the method and apparatusHITACHI LTD·Filed 2006·Granted Apr 8, 2008·0 cites·3 claims
- 2947US4477183AAutomatic focusing apparatusHITACHI LTD·Filed 1982·Granted Oct 16, 1984·8 cites·7 claims
- 3047US4380395AReduction projection aligner systemHITACHI LTD·Filed 1980·Granted Apr 19, 1983·9 cites·5 claims
- 3143US4317383AProportional linear output systemHITACHI LTD·Filed 1980·Granted Mar 2, 1982·8 cites·11 claims
- 3239US2001042705A1Method for classifying defects and device for the sameFiled 2001·Application pending·0 cites
- 3331US4597669APattern detectorHITACHI LTD·Filed 1983·Granted Jul 1, 1986·2 cites·3 claims
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