Inventor · disambiguated record
Masami Yonekawa
Also filed as: YONEKAWA MASAMI
20 granted patents·5 pending applications·235 citations·filing 1991–2025
94Inventor score
Top patents by PatentIndex Score
25 records- 0190US10228624B2Lithography apparatus and article manufacturing methodCANON KK·Filed 2017·Granted Mar 12, 2019·4 cites·19 claims
- 0289US11798818B2Container, processing apparatus, particle removing method, and method of manufacturing articleCANON KK·Filed 2019·Granted Oct 24, 2023·5 cites·7 claims
- 0388US5184176AProjection exposure apparatus with an aberration compensation device of a projection lensCANON KK·Filed 1991·Granted Feb 2, 1993·66 cites·11 claims
- 0482US11036149B2Imprint apparatus, method of operating the same, and method of manufacturing articleCANON KK·Filed 2018·Granted Jun 15, 2021·2 cites·33 claims
- 0582US7911588B2Exposure apparatus and originalCANON KK·Filed 2008·Granted Mar 22, 2011·6 cites·4 claims
- 0682US2025065381A1Particle removal method, particle removal apparatus, and method for manufacturing articleCANON KK·Filed 2024·Application pending·0 cites
- 0777US12157150B2Particle removal method, particle removal apparatus, and method for manufacturing articleCANON KK·Filed 2022·Granted Dec 3, 2024·0 cites·13 claims
- 0877US5953106AProjection optical system, exposure apparatus and semiconductor-device manufacturing method using the systemCANON KK·Filed 1997·Granted Sep 14, 1999·41 cites·56 claims
- 0974US7193682B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2004·Granted Mar 20, 2007·14 cites·14 claims
- 1074US6741328B2Exposure apparatus and its control method, stage apparatus, and device manufacturing methodCANON KK·Filed 2001·Granted May 25, 2004·14 cites·35 claims
- 1173US12292368B2Evaluation method, substrate processing apparatus, manufacturing method of substrate processing apparatus and article manufacturing methodCANON KK·Filed 2022·Granted May 6, 2025·0 cites·14 claims
- 1273US6330052B1Exposure apparatus and its control method, stage apparatus, and device manufacturing methodCANON KK·Filed 1999·Granted Dec 11, 2001·33 cites·12 claims
- 1372US2025216310A1Evaluation method, substrate processing apparatus, manufacturing method of substrate processing apparatus and article manufacturing methodCANON KK·Filed 2025·Application pending·0 cites
- 1467US7319507B2Apparatus and method for removing contaminant on original, method of manufacturing device, and originalCANON KK·Filed 2005·Granted Jan 15, 2008·2 cites·14 claims
- 1566US8814970B2Trapping device that traps particles in vacuum atmosphereYONEKAWA MASAMI·Filed 2011·Granted Aug 26, 2014·2 cites·10 claims
- 1661US6088082AProjection aligner and projection aligning methodCANON KK·Filed 1998·Granted Jul 11, 2000·21 cites·16 claims
- 1756US7670754B2Exposure apparatus having a processing chamber, a vacuum chamber and first and second load lock chambersCANON KK·Filed 2004·Granted Mar 2, 2010·5 cites·14 claims
- 1855US9213231B2Reflective original, exposure method, and device manufacturing methodCANON KK·Filed 2014·Granted Dec 15, 2015·0 cites·14 claims
- 1953US10444646B2Lithography apparatus and method of manufacturing articleCANON KK·Filed 2018·Granted Oct 15, 2019·0 cites·12 claims
- 2052US6433351B1Exposure apparatus and control method for correcting an exposure optical system on the basis of an estimated magnification variationCANON KK·Filed 1999·Granted Aug 13, 2002·13 cites·56 claims
- 2150US2007127004A1Exposure apparatus and device manufacturing methodCANON KK·Filed 2007·Application pending·0 cites
- 2245US2010183987A1Exposure apparatusCANON KK·Filed 2007·Application pending·0 cites
- 2342US10889052B2Imprint apparatus, method for manufacturing article, and exposure apparatusCANON KK·Filed 2017·Granted Jan 12, 2021·0 cites·11 claims
- 2441US5654792AProjection exposure apparatus which determines the minimum number of shots to optimially expose the substrate surfaceCANON KK·Filed 1996·Granted Aug 5, 1997·7 cites·7 claims
- 2541US2007285635A1Exposure apparatus, removal method, and device manufacturing methodYONEKAWA MASAMI·Filed 2007·Application pending·0 cites
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