Inventor · disambiguated record
Shinji Mizutani
Also filed as: MIZUTANI SHINJI
14 granted patents·1 pending application·532 citations·filing 1987–2003
94Inventor score
Top patents by PatentIndex Score
15 records- 0190US6888621B2Mask-holding apparatus for a light exposure apparatus and related scanning-exposure methodNIKON CORP·Filed 2003·Granted May 3, 2005·32 cites·37 claims
- 0290US5532091AAligning methodNIKON CORP·Filed 1995·Granted Jul 2, 1996·86 cites·8 claims
- 0388US6184972B1Substrate transport apparatus, substrate holding apparatus and substrate processing apparatusNIKON CORP·Filed 1999·Granted Feb 6, 2001·111 cites·19 claims
- 0484US5805866AAlignment methodNIKON CORP·Filed 1997·Granted Sep 8, 1998·76 cites·34 claims
- 0582US6163366AExposure method and apparatusNIKON CORP·Filed 1997·Granted Dec 19, 2000·53 cites·55 claims
- 0682US5601957AMicro devices manufacturing method comprising the use of a second pattern overlying an alignment mark to reduce flatteningNIKON CORP·Filed 1995·Granted Feb 11, 1997·43 cites·10 claims
- 0777US7266664B2Memory device for controlling nonvolatile and volatile memoriesSPANSION LLC·Filed 2002·Granted Sep 4, 2007·26 cites·35 claims
- 0877US5907405AAlignment method and exposure systemNIKON CORP·Filed 1997·Granted May 25, 1999·40 cites·20 claims
- 0977US5721605AAlignment device and method with focus detection systemNIKON CORP·Filed 1995·Granted Feb 24, 1998·35 cites·15 claims
- 1068US6566022B2Micro devices manufacturing method and apparatus thereforNIKON CORP·Filed 2001·Granted May 20, 2003·7 cites·19 claims
- 1163US6641962B2Micro devices manufacturing method utilizing concave and convex alignment mark patternsNIKON CORP·Filed 2003·Granted Nov 4, 2003·5 cites·11 claims
- 1245US4753599AAutomotive steering assemblyTOKAI RIKA CO LTD·Filed 1987·Granted Jun 28, 1988·9 cites·12 claims
- 1343US6016186AAlignment device and method with focus detection systemNIKON CORP·Filed 1997·Granted Jan 18, 2000·8 cites·19 claims
- 1439US2003179354A1Mask-holding apparatus for a light exposure apparatus and related scanning-exposure methodNIKON CORP·Filed 2003·Application pending·0 cites
- 1533US6306548B1Micro devices manufacturing method and apparatus thereforNIKON CORP·Filed 1999·Granted Oct 23, 2001·1 cites·14 claims
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