Inventor · disambiguated record
Mirko Kehr
Also filed as: KEHR MIRKO
3 granted patents·5 pending applications·0 citations·filing 2013–2024
40Inventor score
Top patents by PatentIndex Score
8 records- 0161US2024290584A1Device for transporting a substrate, treatment device with a receiving plate adapted to a substrate carrier of a device of this kind, and method for processing a substrate using a device of this kind for the transport of a substrate, and treatment facilityMEYER BURGER GERMANY GMBH·Filed 2024·Application pending·0 cites
- 0241US12009186B2Device for transporting substrate, treatment device with receiving plate adapted to substrate carrier of a device of this kind, and method for processing a substrate using a device of this kind for the transport of a substrate, and treatment facilityMEYER BURGER GERMANY GMBH·Filed 2018·Granted Jun 11, 2024·0 cites·17 claims
- 0333US10199250B2Substrate processing deviceMEYER BURGER GERMANY GMBH·Filed 2013·Granted Feb 5, 2019·0 cites·23 claims
- 0430US2017069468A1Device for Processing Plasma with a Circulation of Process Gas in Multiple PlasmasMEYER BURGER (GERMANY) AG·Filed 2015·Application pending·0 cites
- 0529US10964568B2Substrate carrierMEYER BURGER GERMANY GMBH·Filed 2016·Granted Mar 30, 2021·0 cites·10 claims
- 0628US2020111647A1Plasma-Treatment Device for Contactlessly Supplying HF Voltage to a Movable Plasma Electrode Unit and Method for Operating Such a Plasma-Treatment DeviceMEYER BURGER GERMANY GMBH·Filed 2017·Application pending·0 cites
- 0727US2020006041A1Electrode unit having an internal electrical network for supplying high-frequency voltage, and carrier arrangement for a plasma treatment systemMEYER BURGER GERMANY GMBH·Filed 2018·Application pending·0 cites
- 0826US2019169744A1Substrate treatment apparatusMEYER BURGER GERMANY GMBH·Filed 2016·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Mirko Kehr files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →