Inventor · disambiguated record
Chunsheng Huang
Also filed as: HUANG CHUNSHENG · HUANG CHUNSHENG J
10 granted patents·4 pending applications·203 citations·filing 1993–2024
89Inventor score
Files withKLA TENCOR CORP3NANOMETRICS INC3MICRONET UNION TECH CHENGDU CO LTD2TROPEL CORP2ESGW HOLDINGS LTD1
Top patents by PatentIndex Score
14 records- 0196US7433034B1Darkfield defect inspection with spectral contentsNANOMETRICS INC·Filed 2005·Granted Oct 7, 2008·58 cites·32 claims
- 0289US5416586AMethod of testing aspherical optical surfaces with an interferometerTROPEL CORP·Filed 1993·Granted May 16, 1995·75 cites·24 claims
- 0388US10809055B2Apparatus and method for measuring topography and gradient of the surfaces, shape, and thickness of patterned and unpatterned wafersKLA CORP·Filed 2019·Granted Oct 20, 2020·5 cites·37 claims
- 0488US7061613B1Polarizing beam splitter and dual detector calibration of metrology device having a spatial phase modulationNANOMETRICS INC·Filed 2004·Granted Jun 13, 2006·35 cites·24 claims
- 0587US10324045B2Surface defect inspection with large particle monitoring and laser power controlKLA TENCOR CORP·Filed 2016·Granted Jun 18, 2019·4 cites·20 claims
- 0669USD580435SExternal hard disk driveESGW HOLDINGS LTD·Filed 2007·Granted Nov 11, 2008·22 cites·1 claims
- 0756US10732424B2Inspection-beam shaping on a sample surface at an oblique angle of incidenceKLA TENCOR CORP·Filed 2019·Granted Aug 4, 2020·0 cites·15 claims
- 0850US9903708B2Method and apparatus to fold optics in tools for measuring shape and/or thickness of a large and thin substrateKLA TENCOR CORP·Filed 2016·Granted Feb 27, 2018·0 cites·20 claims
- 0950US2025316069A1Non-motor Vehicle Recognition Method and System Based on Multi-sensor CollaborationMICRONET UNION TECH CHENGDU CO LTD·Filed 2024·Application pending·0 cites
- 1048US2025149795A1Circularly Polarized Satellite Antenna Based on Magnetoelectric DipoleMICRONET UNION TECH CHENGDU CO LTD·Filed 2024·Application pending·0 cites
- 1146US9279663B2Method and apparatus to fold optics in tools for measuring shape and/or thickness of a large and thin substrateWANG CHUNHAI·Filed 2012·Granted Mar 8, 2016·0 cites·20 claims
- 1236US2005036143A1Reference calibration of metrology instrumentNANOMETRICS INC·Filed 2003·Application pending·0 cites
- 1335US2015176973A1A dual interferometer system with a short reference flat distance for wafer shape and thickness variation measurementTANG SHOUHONG·Filed 2011·Application pending·0 cites
- 1432US5349434AMethod of measuring artifact taperTROPEL CORP·Filed 1993·Granted Sep 20, 1994·4 cites·27 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →