Inventor · disambiguated record
Andrey Evgenievich Stepanov
Also filed as: STEPANOV ANDREY · STEPANOV ANDREY EVGENIEVICH
8 granted patents·1 pending application·12 citations·filing 2016–2022
78Inventor score
Top patents by PatentIndex Score
9 records- 0190US11978620B2Swirler for laser-sustained plasma light source with reverse vortex flowKLA CORP·Filed 2022·Granted May 7, 2024·2 cites·30 claims
- 0289US11776804B2Laser-sustained plasma light source with reverse vortex flowKLA CORP·Filed 2022·Granted Oct 3, 2023·4 cites·29 claims
- 0388US11690162B2Laser-sustained plasma light source with gas vortex flowKLA CORP·Filed 2021·Granted Jun 27, 2023·4 cites·29 claims
- 0475US11262591B2System and method for pumping laser sustained plasma with an illumination source having modified pupil power distributionKLA TENCOR CORP·Filed 2018·Granted Mar 1, 2022·2 cites·27 claims
- 0564US11921297B2System and method for pumping laser sustained plasma with an illumination source having modified pupil power distributionKLA CORP·Filed 2022·Granted Mar 5, 2024·0 cites·34 claims
- 0651US11596048B2Rotating lamp for laser-sustained plasma illumination sourceKLA CORP·Filed 2020·Granted Feb 28, 2023·0 cites·21 claims
- 0743US11340880B2Application management service including package fileHEWLETT PACKARD DEVELOPMENT CO·Filed 2018·Granted May 24, 2022·0 cites·13 claims
- 0841US11635700B2Method and apparatus for EUV mask inspectionKLA CORP·Filed 2021·Granted Apr 25, 2023·0 cites·19 claims
- 0936US2017068823A1Method of managing registry information of image forming apparatus registered to cloud printing system, and cloud printing system for performing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2016·Application pending·0 cites
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