Inventor · disambiguated record
Steven H. Johnston
Also filed as: JOHNSTON STEVEN H · JOHNSTON STEVEN HILTON
4 granted patents·3 pending applications·32 citations·filing 2004–2008
73Inventor score
Technology areasH10P
Top patents by PatentIndex Score
7 records- 0177US7368393B2Chemical oxide removal of plasma damaged SiCOH low k dielectricsIBM·Filed 2006·Granted May 6, 2008·5 cites·27 claims
- 0277US7129159B2Integrated dual damascene RIE process with organic patterning layerIBM·Filed 2004·Granted Oct 31, 2006·23 cites·20 claims
- 0355US8106485B2Chemical oxide removal of plasma damaged SiCOH low k dielectricsAMERICA WILLIAM G·Filed 2008·Granted Jan 31, 2012·1 cites·16 claims
- 0453US2008210269A1Removing unwanted film from wafer edge region with reactive gas jetIBM·Filed 2008·Application pending·0 cites
- 0553US2008210270A1Removing unwanted film from wafer edge region with reactive gas jetIBM·Filed 2008·Application pending·0 cites
- 0649US7404874B2Method and apparatus for treating wafer edge region with toroidal plasmaIBM·Filed 2004·Granted Jul 29, 2008·3 cites·12 claims
- 0741US2005284568A1Removing unwanted film from wafer edge region with reactive gas jetIBM·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →