Inventor · disambiguated record
Martin Kent
Also filed as: KENT MARTIN · KENT MARTIN A
7 granted patents·1 pending application·873 citations·filing 1992–2015
87Inventor score
Top patents by PatentIndex Score
8 records- 0198US7651583B2Processing system and method for treating a substrateTOKYO ELECTRON LTD·Filed 2004·Granted Jan 26, 2010·558 cites·21 claims
- 0297US5248371AHollow-anode glow discharge apparatusGEN SIGNAL CORP·Filed 1992·Granted Sep 28, 1993·255 cites·22 claims
- 0389US6779481B2Electrical coupling between chamber parts in electronic device processing equipmentTOKYO ELECTRON LTD·Filed 2001·Granted Aug 24, 2004·50 cites·27 claims
- 0485US7718032B2Dry non-plasma treatment system and method of usingTOKYO ELECTRON LTD·Filed 2006·Granted May 18, 2010·8 cites·15 claims
- 0568US8828185B2Dry non-plasma treatment system and method of usingKENT MARTIN·Filed 2010·Granted Sep 9, 2014·2 cites·13 claims
- 0659US9115429B2Dry non-plasma treatment system and method of usingTOKYO ELECTRON LTD·Filed 2014·Granted Aug 25, 2015·0 cites·12 claims
- 0754US11745202B2Dry non-plasma treatment systemTOKYO ELECTRON LTD·Filed 2015·Granted Sep 5, 2023·0 cites·20 claims
- 0838US2005269291A1Method of operating a processing system for treating a substrateTOKYO ELECTRON LTD·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →