Inventor · disambiguated record
Michel François Hubert Klaassen
Also filed as: KLAASSEN MICHEL FRANÇOIS HUBERT
3 granted patents·1 citations·filing 2011–2013
49Inventor score
Top patents by PatentIndex Score
3 records- 0157US9170498B2Lithographic apparatus and a method for determining a polarization property of a projection system using an adjustable polarizer and interferometric sensorASML NETHERLANDS BV·Filed 2013·Granted Oct 27, 2015·0 cites·12 claims
- 0255US8958053B2Lithographic apparatus and alignment methodKLAASSEN MICHEL FRANÇOIS HUBERT·Filed 2011·Granted Feb 17, 2015·1 cites·15 claims
- 0328US8730454B2EUV radiation source and method of generating EUV radiationKLAASSEN MICHEL FRANÇOIS HUBERT·Filed 2011·Granted May 20, 2014·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →