Inventor · disambiguated record
Sean Berglund
Also filed as: BERGLUND SEAN
1 granted patent·3 pending applications·0 citations·filing 2023–2024
4Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
4 records- 0155US2025105066A1Systems and methods that use infrared (ir) spectroscopy to monitor process chemicals utilized in a semiconductor processTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0254US2025364335A1Systems and methods for wafer processing with sensor technologiesTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0353US12424467B2Systems and methods for determining a localized fluid velocity on a spinning substrate by tracking movement of a tracer across the spinning substrateTOKYO ELECTRON LTD·Filed 2023·Granted Sep 23, 2025·0 cites·14 claims
- 0453US2024421009A1Systems and methods for determining a fluid height and/or a fluid velocity on a spinning substrateTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →