Inventor · disambiguated record
Ce Qin
Also filed as: QIN CE
8 granted patents·2 pending applications·47 citations·filing 2004–2020
82Inventor score
Top patents by PatentIndex Score
10 records- 0190US9741563B2Hybrid stair-step etchLAM RES CORP·Filed 2016·Granted Aug 22, 2017·10 cites·18 claims
- 0282US7276122B2Multi-workpiece processing chamberMATTSON TECH INC·Filed 2004·Granted Oct 2, 2007·25 cites·24 claims
- 0379US8066815B2Multi-workpiece processing chamberDEVINE DANIEL J·Filed 2007·Granted Nov 29, 2011·7 cites·13 claims
- 0478US8535549B2Method for forming stair-step structuresFU QIAN·Filed 2011·Granted Sep 17, 2013·5 cites·17 claims
- 0550US2009206056A1Method and Apparatus for Plasma Process Performance Matching in Multiple Wafer ChambersXU SONGLIN·Filed 2009·Application pending·0 cites
- 0645US12165878B2Semiconductor mask reshaping using a sacrificial layerLAM RES CORP·Filed 2020·Granted Dec 10, 2024·0 cites·19 claims
- 0743US11646207B2Silicon oxide silicon nitride stack stair step etchLAM RES CORP·Filed 2018·Granted May 9, 2023·0 cites·19 claims
- 0843USRE46464EMethod for forming stair-step structuresLAM RES CORP·Filed 2015·Granted Jul 4, 2017·0 cites·17 claims
- 0940US2008124937A1Selective etching method and apparatusXU SONGLIN·Filed 2006·Application pending·0 cites
- 1036US11037784B2Amorphous carbon layer opening processLAM RES CORP·Filed 2019·Granted Jun 15, 2021·0 cites·17 claims
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