Assignee
XU SONGLIN
0 granted patents·6 pending applications·0 citations·filing 2006–2014
Top patents by PatentIndex Score
6 records- 0150US2009206056A1Method and Apparatus for Plasma Process Performance Matching in Multiple Wafer ChambersXU SONGLIN·Filed 2009·Application pending·0 cites
- 0248US2016131176A1Anti-loosening cylindrical threaded partXU SONGLIN·Filed 2014·Application pending·0 cites
- 0348US2016115990A1Anti-loosening cylindrical threaded partXU SONGLIN·Filed 2014·Application pending·0 cites
- 0448US2016153486A1Anti-loosening threaded partXU SONGLIN·Filed 2014·Application pending·0 cites
- 0543US2014083613A1Gas supply device for a vacuum processing chamber, method of gas supplying and switchingXU SONGLIN·Filed 2013·Application pending·0 cites
- 0640US2008124937A1Selective etching method and apparatusXU SONGLIN·Filed 2006·Application pending·0 cites
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