Inventor · disambiguated record
Junichiro Matsunaga
Also filed as: MATSUNAGA JUNICHIRO
5 granted patents·1 pending application·5 citations·filing 2014–2025
68Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD6
Top patents by PatentIndex Score
6 records- 0174US9607855B2Etching method and storage mediumTOKYO ELECTRON LTD·Filed 2016·Granted Mar 28, 2017·2 cites·10 claims
- 0268US11342192B2Substrate processing method and storage mediumTOKYO ELECTRON LTD·Filed 2018·Granted May 24, 2022·1 cites·8 claims
- 0365US10312079B2Etching methodTOKYO ELECTRON LTD·Filed 2015·Granted Jun 4, 2019·1 cites·6 claims
- 0464US9691630B2Etching methodTOKYO ELECTRON LTD·Filed 2014·Granted Jun 27, 2017·1 cites·20 claims
- 0560US12054824B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Aug 6, 2024·0 cites·15 claims
- 0650US2025183047A1Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →