Inventor · disambiguated record

Frederik Matthias Spiegelhalder

Also filed as: SPIEGELHALDER FREDERIK MATTHIAS

3 granted patents·7 citations·filing 20122018

61Inventor score
Technology areasB82YG02BH01J
Files withASML NETHERLANDS BV1DE BOER GUIDO1MAPPER LITHOGRAPHY IP BV1

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3 records

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