Inventor · disambiguated record

Waltraud Dietl

Also filed as: DIETL WALTRAUD

2 granted patents·10 citations·filing 2003–2009

47Inventor score

Technology areasH10P

Files withDIETL WALTRAUD1 MATTSON TECH INC1

Top patents by PatentIndex Score

2 records

0160US7101812B2Method of forming and/or modifying a dielectric film on a semiconductor surfaceMATTSON TECH INC·Filed 2003·Granted Sep 5, 2006·10 cites·33 claims
0230US9111970B2Apparatus for the heat treatment of disc shaped substratesDIETL WALTRAUD·Filed 2009·Granted Aug 18, 2015·0 cites·43 claims

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