Inventor · disambiguated record
Shiow-Hwei Hwang
Also filed as: HWANG SHIOW-HWEI
13 granted patents·185 citations·filing 2003–2014
91Inventor score
Top patents by PatentIndex Score
13 records- 0195US7061625B1Method and apparatus using interferometric metrology for high aspect ratio inspectionKLA TENCOR TECH CORP·Filed 2003·Granted Jun 13, 2006·85 cites·55 claims
- 0291US7259869B2System and method for performing bright field and dark field optical inspectionKLA TENCOR TECH CORP·Filed 2005·Granted Aug 21, 2007·19 cites·34 claims
- 0383US7924434B2Systems configured to generate output corresponding to defects on a specimenKLA TENCOR TECH CORP·Filed 2006·Granted Apr 12, 2011·8 cites·18 claims
- 0483US7327464B2System and method for coherent optical inspectionKLA TENCOR TECH CORP·Filed 2007·Granted Feb 5, 2008·7 cites·16 claims
- 0582US7095507B1Method and apparatus using microscopic and interferometric based detectionKLA TENCOR TECH CORP·Filed 2003·Granted Aug 22, 2006·30 cites·15 claims
- 0680US8355140B2Systems configured to generate output corresponding to defects on a specimenKLA TENCOR TECH CORP·Filed 2011·Granted Jan 15, 2013·3 cites·12 claims
- 0778US8575576B2Optical imaging system with laser droplet plasma illuminatorSOLARZ RICHARD W·Filed 2011·Granted Nov 5, 2013·6 cites·27 claims
- 0875US7209239B2System and method for coherent optical inspectionKLA TENCOR TECH CORP·Filed 2003·Granted Apr 24, 2007·16 cites·43 claims
- 0969US8384887B2Methods and systems for inspection of a specimen using different inspection parametersKLA TENCOR TECH CORP·Filed 2010·Granted Feb 26, 2013·1 cites·41 claims
- 1068US7738089B2Methods and systems for inspection of a specimen using different inspection parametersKLA TENCOR TECH CORP·Filed 2004·Granted Jun 15, 2010·7 cites·16 claims
- 1167US10429319B2Inspection system including parallel imaging paths with multiple and selectable spectral bandsKLA TENCOR CORP·Filed 2014·Granted Oct 1, 2019·1 cites·32 claims
- 1267US9052494B2Optical imaging system with catoptric objective; broadband objective with mirror; and refractive lenses and broadband optical imaging system having two or more imaging pathsHWANG SHIOW-HWEI·Filed 2010·Granted Jun 9, 2015·2 cites·47 claims
- 1347US8178860B2Image collectionKIRK GREGORY L·Filed 2009·Granted May 15, 2012·0 cites·18 claims
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