Inventor · disambiguated record
Mark Johnsgard
Also filed as: JOHNSGARD MARK · JOHNSGARD MARK W
14 granted patents·1 pending application·263 citations·filing 1989–2022
91Inventor score
Top patents by PatentIndex Score
15 records- 0191US6301434B1Apparatus and method for CVD and thermal processing of semiconductor substratesMATTSON TECH INC·Filed 1999·Granted Oct 9, 2001·133 cites·22 claims
- 0286US4986838AInlet system for gas scrubberAIRGARD INC·Filed 1989·Granted Jan 22, 1991·69 cites·19 claims
- 0384US6902622B2Systems and methods for epitaxially depositing films on a semiconductor substrateMATTSON TECH INC·Filed 2002·Granted Jun 7, 2005·38 cites·23 claims
- 0481US10864526B2Electrode for electrostatic precipitator gas scrubbing apparatusAIRGARD INC·Filed 2018·Granted Dec 15, 2020·2 cites·18 claims
- 0578US7611684B2Effluent gas scrubber and method of scrubbing effluent gassesAIRGARD INC·Filed 2007·Granted Nov 3, 2009·8 cites·20 claims
- 0674US7854792B2Reactive gas controlAIRGARD INC·Filed 2008·Granted Dec 21, 2010·5 cites·20 claims
- 0767US7942951B2Apparatus and method for providing heated effluent gases to a scrubberAIRGARD INC·Filed 2009·Granted May 17, 2011·3 cites·14 claims
- 0866US11976890B2Concentrically heated inlet tube for gas scrubbing apparatusAIRGARD INC·Filed 2022·Granted May 7, 2024·0 cites·10 claims
- 0961US9138679B2Systems and methods to prevent back-flash in an abatement systemAIRGARD INC·Filed 2014·Granted Sep 22, 2015·1 cites·19 claims
- 1054US7794678B2Effluent gas scrubbingAIRGARD INC·Filed 2009·Granted Sep 14, 2010·0 cites·26 claims
- 1152US9023303B2Extended or multiple reaction zones in scrubbing apparatusAIRGARD INC·Filed 2014·Granted May 5, 2015·0 cites·24 claims
- 1252US7771514B1Apparatus and method for providing heated effluent gases to a scrubberAIRGARD INC·Filed 2004·Granted Aug 10, 2010·4 cites·26 claims
- 1348US8496741B2Reactive gas controlJOHNSGARD MARK·Filed 2010·Granted Jul 30, 2013·0 cites·21 claims
- 1438US8771407B2Momentum transfer using liquid injectionJOHNSGARD MARK·Filed 2011·Granted Jul 8, 2014·0 cites·37 claims
- 1538US2005133159A1Systems and methods for epitaxially depositing films on a semiconductor substrateFiled 2004·Application pending·0 cites
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