Inventor · disambiguated record
Yutaka Kokaze
Also filed as: KOKAZE YUTAKA
2 granted patents·9 pending applications·0 citations·filing 2007–2019
22Inventor score
Top patents by PatentIndex Score
11 records- 0143US2010213170A1Etching method and etching apparatusULVAC INC·Filed 2008·Application pending·0 cites
- 0242US2009275146A1Method and apparatus for manufacturing deviceULVAC INC·Filed 2009·Application pending·0 cites
- 0341US2010151150A1Plasma processing apparatus and manufacturing method of deposition-inhibitory memberULVAC INC·Filed 2008·Application pending·0 cites
- 0439US2008026539A1Capacitance element manufacturing method and etching methodULVAC INC·Filed 2007·Application pending·0 cites
- 0537US8133325B2Dry cleaning method for plasma processing apparatusUEDA MASAHISA·Filed 2008·Granted Mar 13, 2012·0 cites·7 claims
- 0636US2021222289A1Sputtering apparatusULVAC INC·Filed 2019·Application pending·0 cites
- 0730US2012152889A1Method for manufacturing piezoelectric elementUEDA MASAHISA·Filed 2012·Application pending·0 cites
- 0829US2018204729A1Substrate processing method and substrate processing deviceULVAC INC·Filed 2016·Application pending·0 cites
- 0928US2013284701A1Method of manufacturing dielectric device and ashing methodYOSHIDA YOSHIAKI·Filed 2011·Application pending·0 cites
- 1027US2017004995A1Film Forming Apparatus and Film Forming MethodULVAC INC·Filed 2016·Application pending·0 cites
- 1126US9305752B2Method for operating substrate processing apparatusKOKAZE YUTAKA·Filed 2012·Granted Apr 5, 2016·0 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →