Inventor · disambiguated record
Tony Dibiase
Also filed as: DIBIASE TONY
8 granted patents·1 pending application·131 citations·filing 2002–2012
86Inventor score
Top patents by PatentIndex Score
9 records- 0195US7408642B1Registration target design for managing both reticle grid error and wafer overlayKLA TENCOR TECH CORP·Filed 2006·Granted Aug 5, 2008·78 cites·37 claims
- 0289US7846266B1Environment friendly methods and systems for template cleaning and reclaiming in imprint lithography technologyKLA TENCOR TECH CORP·Filed 2006·Granted Dec 7, 2010·15 cites·17 claims
- 0385US8104342B2Process condition measuring deviceSUN MEI H·Filed 2008·Granted Jan 31, 2012·16 cites·37 claims
- 0475US7924408B2Temperature effects on overlay accuracyKLA TENCOR TECH CORP·Filed 2007·Granted Apr 12, 2011·4 cites·17 claims
- 0573US6977183B1Process for locating, displaying, analyzing, and optionally monitoring potential transient defect sites in one or more integrated circuit chips of a semiconductor substrateKLA TENCOR TECH CORP·Filed 2002·Granted Dec 20, 2005·15 cites·13 claims
- 0662US7987057B1Intelligent stitching boundary defect inspectionKLA TENCOR CORP·Filed 2008·Granted Jul 26, 2011·3 cites·1 claims
- 0748US7202094B2Process for locating, displaying, analyzing, and optionally monitoring potential transient defect sites in one or more integrated circuit chips of a semiconductor substrateKLA TENCOR TECH CORP·Filed 2005·Granted Apr 10, 2007·0 cites·10 claims
- 0846US2013029433A1Process condition measuring deviceKLA TENCOR CORP·Filed 2012·Application pending·0 cites
- 0942US8121396B1Assessing critical dimension and overlay toleranceDIBIASE TONY·Filed 2007·Granted Feb 21, 2012·0 cites·2 claims
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