Inventor · disambiguated record
Abhishek Manohar
Also filed as: MANOHAR ABHISHEK · MANOHAR ABHISHEK A
3 granted patents·2 pending applications·127 citations·filing 2008–2013
76Inventor score
Top patents by PatentIndex Score
5 records- 0195US8551885B2Method for reducing tungsten roughness and improving reflectivityCHEN FENG·Filed 2008·Granted Oct 8, 2013·68 cites·21 claims
- 0292US8853080B2Method for depositing tungsten film with low roughness and low resistivityGUAN YAN·Filed 2012·Granted Oct 7, 2014·38 cites·19 claims
- 0388US8262800B1Methods and apparatus for cleaning deposition reactorsWONGSENAKHUM PANYA·Filed 2008·Granted Sep 11, 2012·21 cites·23 claims
- 0453US2015030766A1Pedestal bottom clean for improved fluorine utilization and integrated symmetric forelineNOVELLUS SYSTEMS INC·Filed 2013·Application pending·0 cites
- 0541US2014069459A1Methods and apparatus for cleaning deposition chambersNOVELLUS SYSTEMS INC·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →