Inventor · disambiguated record
Vidya Vaenkatesan
Also filed as: VAENKATESAN VIDYA
2 granted patents·4 citations·filing 2006–2019
41Inventor score
Technology areasG03F
Top patents by PatentIndex Score
2 records- 0160US8233155B2Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing methodKIERS ANTOINE GASTON MARIE·Filed 2006·Granted Jul 31, 2012·4 cites·19 claims
- 0254US11287748B2Guided patterning device inspectionASML NETHERLANDS BV·Filed 2019·Granted Mar 29, 2022·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →