Inventor · disambiguated record
Uwe Schüßler
Also filed as: SCHUEΒLER UWE · Schüßler Uwe
3 granted patents·9 pending applications·6 citations·filing 2008–2021
55Inventor score
Files withAPPLIED MATERIALS INC7APPLIED FILMS GMBH & CO1BANGERT STEFAN1DIEGUEZ-CAMPO JOSE MANUEL1KELLER STEFAN1
Top patents by PatentIndex Score
12 records- 0181US9899635B2System for depositing one or more layers on a substrate supported by a carrier and method using the sameAPPLIED MATERIALS INC·Filed 2014·Granted Feb 20, 2018·6 cites·20 claims
- 0269US2021269912A1Evaporation source for organic material, deposition apparatus for depositing organic materials in a vacuum chamber having an evaporation source for organic material, and method for evaporating organic materialAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 0365US2019032194A2A processing apparatus for processing devices, particularly devices including organic materials therein, and method for transferring an evaporation source from a processing vacuum chamber to a maintenance vacuum chamber or from the maintenance vacuum chamber to the processing vacuum chamberDIEGUEZ CAMPO JOSE MANUEL·Filed 2014·Application pending·0 cites
- 0461US2017005297A1Evaporation source for organic material, apparatus having an evaporation source for organic material, system having an evaporation deposition apparatus with an evaporation source for organic materials, and method for operating an evaporation source for organic materialBANGERT STEFAN·Filed 2013·Application pending·0 cites
- 0561US2017346044A1Evaporation source for organic material, deposition apparatus for depositing organic materials in a vacuum chamber having an evaporation source for organic material, and method for evaporating organic materialAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 0655US2017314120A1Material deposition arrangement, a vacuum deposition system and method for depositing materialAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 0755US2017321318A1Material source arrangment and nozzle for vacuum depositionAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 0854US7959776B2Cooled backing plate for a sputtering target, and sputtering target comprising a plurality of backing platesAPPLIED FILMS GMBH & CO·Filed 2008·Granted Jun 14, 2011·0 cites·1 claims
- 0948US10546732B2Sputter deposition source, apparatus for sputter deposition and method of assembling thereofAPPLIED MATERIALS INC·Filed 2013·Granted Jan 28, 2020·0 cites·18 claims
- 1046US2017022598A1Depositing arrangement, deposition apparatus and methods of operation thereofSchüßler Uwe·Filed 2013·Application pending·0 cites
- 1141US2016276142A1Substrate carrier for a reduced transmission of thermal energyAPPLIED MATERIALS INC·Filed 2013·Application pending·0 cites
- 1233US2018171466A1Carrier for supporting at least one substrate during a sputter deposition process, apparatus for sputter deposition on at least one substrate, and method for sputter deposition on at least one substrateKELLER STEFAN·Filed 2015·Application pending·0 cites
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