Inventor · disambiguated record
Yuko Egawa
Also filed as: EGAWA YUKO
2 granted patents·1 pending application·85 citations·filing 2002–2003
68Inventor score
Technology areasH10P
Files withHITACHI HIGH TECH CORP2
Top patents by PatentIndex Score
3 records- 0187US6758647B2System for producing wafersHITACHI HIGH TECH CORP·Filed 2002·Granted Jul 6, 2004·51 cites·7 claims
- 0281US6979168B2Method and apparatus for transferring substrateHITACHI HIGH TECH CORP·Filed 2002·Granted Dec 27, 2005·34 cites·4 claims
- 0337US2004146379A1System and method of producing waferFiled 2003·Application pending·0 cites
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