Inventor · disambiguated record
Maarten Marinus Johannes Wilhelmus Van Herpen
Also filed as: VAN HERPEN MAARTEN · VAN HERPEN MAARTEN M J W · VAN HERPEN MAARTEN MARINUS · VAN HERPEN MAARTEN MARINUS JHANNES WILHELM
118 granted patents·42 pending applications·697 citations·filing 2004–2019
99Inventor score
Files withASML NETHERLANDS BV55VAN HERPEN MAARTEN MARINUS JOHANNES WILHELMUS31KONINKL PHILIPS ELECTRONICS NV30SOER WOUTER ANTHON8PHILIPS LIGHTING HOLDING BV7
Top patents by PatentIndex Score
160 records- 0198US7462850B2Radical cleaning arrangement for a lithographic apparatusASML NETHERLANDS BV·Filed 2005·Granted Dec 9, 2008·60 cites·13 claims
- 0296US7106832B2Apparatus including a radiation source, a filter system for filtering particles out of radiation emitted by the source, and a processing system for processing the radiation, a lithographic apparatus including such an apparatus, and a method of filtering particles out of radiation emitting and propagating from a radiation sourceASML NETHERLANDS BV·Filed 2005·Granted Sep 12, 2006·33 cites·64 claims
- 0394US7414700B2Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatusASML NETHERLANDS BV·Filed 2005·Granted Aug 19, 2008·16 cites·64 claims
- 0493US8564207B2Carpet unit comprising optical sensorVAN HERPEN MAARTEN MARINUS JOHANNES WILHELMUS·Filed 2010·Granted Oct 22, 2013·12 cites·11 claims
- 0593US7332731B2Radiation system and lithographic apparatusASML NETHERLANDS BV·Filed 2005·Granted Feb 19, 2008·15 cites·20 claims
- 0692US8026103B2Breath test for total organic carbonKONINKL PHILIPS ELECTRONICS NV·Filed 2006·Granted Sep 27, 2011·20 cites·20 claims
- 0792US7473908B2Getter and cleaning arrangement for a lithographic apparatus and method for cleaning a surfaceASML NETHERLANDS BV·Filed 2006·Granted Jan 6, 2009·22 cites·32 claims
- 0892US7372049B2Lithographic apparatus including a cleaning device and method for cleaning an optical elementASML NETHERLANDS BV·Filed 2005·Granted May 13, 2008·21 cites·27 claims
- 0991US7598503B2Lithographic apparatus and cleaning method thereforASML NETHERLANDS BV·Filed 2006·Granted Oct 6, 2009·11 cites·20 claims
- 1090US7463413B2Spectral purity filter for a multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Dec 9, 2008·8 cites·21 claims
- 1190US7336416B2Spectral purity filter for multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Feb 26, 2008·12 cites·18 claims
- 1289US7518128B2Lithographic apparatus comprising a cleaning arrangement, cleaning arrangement and method for cleaning a surface to be cleanedASML NETHERLANDS BV·Filed 2006·Granted Apr 14, 2009·10 cites·20 claims
- 1388US8139200B2Spectral purity filter for multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing methodVAN HERPEN MAARTEN MARINUS JOHANNES WILHELMUS·Filed 2011·Granted Mar 20, 2012·6 cites·20 claims
- 1488US7812330B2Radical cleaning arrangement for a lithographic apparatusASML NETHERLANDS BV·Filed 2008·Granted Oct 12, 2010·8 cites·10 claims
- 1588US7750326B2Lithographic apparatus and cleaning method thereforASML NETHERLANDS BV·Filed 2005·Granted Jul 6, 2010·8 cites·21 claims
- 1688US7504643B2Method for cleaning a lithographic apparatus module, a cleaning arrangement and a lithographic apparatus comprising the cleaning arrangementASML NETHERLANDS BV·Filed 2006·Granted Mar 17, 2009·10 cites·50 claims
- 1788US7145132B2Lithographic apparatus, illumination system and debris trapping systemASML NETHERLANDS BV·Filed 2004·Granted Dec 5, 2006·30 cites·45 claims
- 1887US8227999B2Light output deviceVAN HERPEN MAARTEN MARINUS JOHANNES WILHELMUS·Filed 2008·Granted Jul 24, 2012·33 cites·13 claims
- 1986US8416391B2Radiation source, lithographic apparatus and device manufacturing methodBANINE VADIM YEVGENYEVICH·Filed 2008·Granted Apr 9, 2013·8 cites·16 claims
- 2086US7262423B2Radiation system and lithographic apparatusASML NETHERLANDS BV·Filed 2005·Granted Aug 28, 2007·8 cites·20 claims
- 2186US7233010B2Radiation system and lithographic apparatusASML NETHERLANDS BV·Filed 2005·Granted Jun 19, 2007·12 cites·27 claims
- 2285US7561247B2Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatusASML NETHERLANDS BV·Filed 2005·Granted Jul 14, 2009·10 cites·55 claims
- 2385US7453645B2Spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted Nov 18, 2008·23 cites·26 claims
- 2484US8742381B2Radiation source with cleaning apparatusASML NETHERLANDS BV·Filed 2013·Granted Jun 3, 2014·3 cites·8 claims
- 2584US7355672B2Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatusASML NETHERLANDS BV·Filed 2004·Granted Apr 8, 2008·16 cites·33 claims
- 2683US9041912B2Spectral purity filters for use in a lithographic apparatusSOER WOUTER ANTHON·Filed 2012·Granted May 26, 2015·3 cites·13 claims
- 2783US8388184B2Light emitting tufted carpetVAN HERPEN MAARTEN MARINUS JOHANNES WILHELMUS·Filed 2008·Granted Mar 5, 2013·7 cites·19 claims
- 2883US8322190B2Optical cavity-enhanced photo acoustic trace gas detector with variable light intensity modulatorKALKMAN JEROEN·Filed 2007·Granted Dec 4, 2012·11 cites·8 claims
- 2983US8207541B2Light output deviceVAN HERPEN MAARTEN MARINUS JOHANNES WILHELMUS·Filed 2008·Granted Jun 26, 2012·6 cites·16 claims
- 3082US9618171B2Light-emitting acoustic building elementPHILIPS LIGHTING HOLDING BV·Filed 2013·Granted Apr 11, 2017·14 cites·15 claims
- 3182US8894233B2Carpet back lighting systemVAN HERPEN MAARTEN MARINUS JOHANNES WILHELMUS·Filed 2010·Granted Nov 25, 2014·7 cites·20 claims
- 3282US8353602B2CompartmentKONINKL PHILIPS ELECTRONICS NV·Filed 2008·Granted Jan 15, 2013·10 cites·15 claims
- 3382US7875863B2Illumination system, lithographic apparatus, mirror, method of removing contamination from a mirror and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Jan 25, 2011·6 cites·26 claims
- 3482US7736820B2Anti-reflection coating for an EUV maskASML NETHERLANDS BV·Filed 2006·Granted Jun 15, 2010·9 cites·64 claims
- 3582US7706057B2Spectral purity filter for a multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing methodASML NETHERLANDS BV·Filed 2008·Granted Apr 27, 2010·5 cites·23 claims
- 3681US8147971B2Self-cleaning system and window-glassVAN HERPEN MAARTEN MARINUS JOHANNES WILHELMUS·Filed 2008·Granted Apr 3, 2012·4 cites·12 claims
- 3781US8109128B2Cavity-enhanced photo acoustic trace gas detector with improved feedback loopKALKMAN JEROEN·Filed 2007·Granted Feb 7, 2012·9 cites·6 claims
- 3881US7541603B2Radiation system and lithographic apparatus comprising the sameASML NETHERLANDS BV·Filed 2006·Granted Jun 2, 2009·6 cites·17 claims
- 3981US7468521B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Dec 23, 2008·6 cites·19 claims
- 4080US7921693B2Photo-acoustic spectrometer apparatusKONINKL PHILIPS ELECTRONICS NV·Filed 2006·Granted Apr 12, 2011·6 cites·15 claims
- 4178US8475026B2Light emitting tufted carpetVAN HERPEN MAARTEN MARINUS JOHANNES WILHELMUS·Filed 2008·Granted Jul 2, 2013·4 cites·13 claims
- 4277US8227771B2Debris prevention system and lithographic apparatusSOER WOUTER ANTHON·Filed 2007·Granted Jul 24, 2012·3 cites·20 claims
- 4376US9220158B2Ambience cinema lighting systemVAN HERPEN MAARTEN MARINUS JOHANNES WILHELMUS·Filed 2010·Granted Dec 22, 2015·3 cites·12 claims
- 4475US8851701B2Padding for a carpet and carpet-padding combinationVAN HERPEN MAARTEN MARINUS JOHANNES WILHELMUS·Filed 2009·Granted Oct 7, 2014·6 cites·12 claims
- 4574US8226259B2Textile light emitting deviceVAN PIETERSON LIESBETH·Filed 2008·Granted Jul 24, 2012·8 cites·14 claims
- 4674US7928412B2Lithographic apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2009·Granted Apr 19, 2011·3 cites·7 claims
- 4774US7397538B2Radiation system and lithographic apparatusASML NETHERLANDS BV·Filed 2006·Granted Jul 8, 2008·3 cites·30 claims
- 4873US8215788B2Tufted textileVAN HERPEN MAARTEN MARINUS JOHANNES WILHELMUS·Filed 2008·Granted Jul 10, 2012·12 cites·14 claims
- 4972US9357615B2Method for guiding a human to a reference location, and lighting system comprising a plurality of light sources for use in such methodVAN HERPEN MAARTEN MARINUS JOHANNES WILHELMUS·Filed 2012·Granted May 31, 2016·4 cites·7 claims
- 5071US8405051B2Method for removing a deposition on an uncapped multilayer mirror of a lithographic apparatus, lithographic apparatus and device manufacturing methodBANINE VADIM YEVGENYEVICH·Filed 2009·Granted Mar 26, 2013·2 cites·10 claims
Showing the top 50 of 160 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →