Inventor · disambiguated record
Miguel Saldana
Also filed as: SALDANA MIG EL A · SALDANA MIGUEL · SALDANA MIGUEL A · SALDANA MIGUEL ANGEL
23 granted patents·11 pending applications·213 citations·filing 1999–2025
95Inventor score
Top patents by PatentIndex Score
34 records- 0192US10544519B2Method and apparatus for surface preparation prior to epitaxial depositionAIXTRON SE·Filed 2017·Granted Jan 28, 2020·8 cites·20 claims
- 0286US12325914B2Precursor delivery system and method for cyclic depositionEUGENUS INC·Filed 2022·Granted Jun 10, 2025·1 cites·21 claims
- 0384US6520833B1Oscillating fixed abrasive CMP system and methods for implementing the sameLAM RES CORP·Filed 2000·Granted Feb 18, 2003·23 cites·22 claims
- 0481US6725120B2Apparatus and methods with resolution enhancement feature for improving accuracy of conversion of required chemical mechanical polishing pressure to force to be applied by polishing head to waferLAM RES CORP·Filed 2001·Granted Apr 20, 2004·19 cites·21 claims
- 0580US6709322B2Apparatus for aligning a surface of an active retainer ring with a wafer surface for chemical mechanical polishingLAM RES CORP·Filed 2001·Granted Mar 23, 2004·22 cites·17 claims
- 0676US6585572B1Subaperture chemical mechanical polishing systemLAM RES CORP·Filed 2000·Granted Jul 1, 2003·18 cites·22 claims
- 0774US2025297364A1Precursor delivery system and method for cyclic depositionEUGENUS INC·Filed 2025·Application pending·0 cites
- 0873US6843707B2Methods for aligning a surface of an active retainer ring with a wafer surface for chemical mechanical polishingLAM RES CORP·Filed 2003·Granted Jan 18, 2005·13 cites·12 claims
- 0973US6083082ASpindle assembly for force controlled polishingLAM RES CORP·Filed 1999·Granted Jul 4, 2000·36 cites·23 claims
- 1070US8845856B2Edge ring assembly for plasma etching chambersKANG MICHAEL S·Filed 2010·Granted Sep 30, 2014·3 cites·6 claims
- 1170US7018273B1Platen with diaphragm and method for optimizing wafer polishingLAM RES CORP·Filed 2003·Granted Mar 28, 2006·13 cites·20 claims
- 1270US2023128366A1Liquid precursor injection for thin film depositionEUGENUS INC·Filed 2022·Application pending·0 cites
- 1369US6561870B2Adjustable force applying air platen and spindle system, and methods for using the sameLAM RES CORP·Filed 2001·Granted May 13, 2003·12 cites·19 claims
- 1468US11459654B2Liquid precursor injection for thin film depositionEUGENUS INC·Filed 2020·Granted Oct 4, 2022·0 cites·20 claims
- 1565US7481695B2Polishing apparatus and methods having high processing workload for controlling polishing pressure applied by polishing headLAM RES CORP·Filed 2000·Granted Jan 27, 2009·10 cites·17 claims
- 1664US8328980B2Apparatus and methods for enhanced fluid delivery on bevel etch applicationsSALDANA MIGUEL A·Filed 2009·Granted Dec 11, 2012·2 cites·11 claims
- 1762US6640155B2Chemical mechanical polishing apparatus and methods with central control of polishing pressure applied by polishing headLAM RES CORP·Filed 2000·Granted Oct 28, 2003·8 cites·14 claims
- 1861US7025854B2Method and apparatus for aligning and setting the axis of rotation of spindles of a multi-body systemLAM RES CORP·Filed 2003·Granted Apr 11, 2006·6 cites·9 claims
- 1960US2024384413A1Showerhead assembly for cyclic vapor deposition with enhanced gas mixingEUGENUS INC·Filed 2024·Application pending·0 cites
- 2058US6719874B1Active retaining ring supportLAM RES CORP·Filed 2001·Granted Apr 13, 2004·7 cites·16 claims
- 2154US2014367047A1Edge ring assembly for plasma etching chambersLAM RES CORP·Filed 2014·Application pending·0 cites
- 2253US6752703B2Chemical mechanical polishing apparatus and methods with porous vacuum chuck and perforated carrier filmLAM RES CORP·Filed 2001·Granted Jun 22, 2004·5 cites·8 claims
- 2353US6579407B1Method and apparatus for aligning and setting the axis of rotation of spindles of a multi-body systemLAM RES CORP·Filed 2000·Granted Jun 17, 2003·3 cites·17 claims
- 2453US2024062993A1Temperature-controlled showerhead assembly for cyclic vapor depositionEUGENUS INC·Filed 2023·Application pending·0 cites
- 2549US2022267898A1Precursor delivery system and method for high speed cyclic depositionEUGENUS INC·Filed 2022·Application pending·0 cites
- 2648US8671965B2Methods for enhanced fluid delivery on bevel etch applicationsSALDANA MIGUEL A·Filed 2012·Granted Mar 18, 2014·0 cites·19 claims
- 2745US6909935B2Methods with resolution enhancement feature for improving accuracy of conversion of required chemical mechanical polishing pressure to force to be applied by polishing head to waferLAM RES CORP·Filed 2004·Granted Jun 21, 2005·1 cites·17 claims
- 2843US6902466B2Oscillating chemical mechanical planarization apparatusLAM RES CORP·Filed 2003·Granted Jun 7, 2005·0 cites·5 claims
- 2942US2003109195A1Oscillating fixed abrasive CMP system and methods for implementing the sameLAM RES CORP·Filed 2003·Application pending·0 cites
- 3038USD803283SWafer handling assemblyVEECO INSTR INC·Filed 2016·Granted Nov 21, 2017·3 cites·1 claims
- 3136US2006000551A1Methods and apparatus for optimal temperature control in a plasma processing systemSALDANA MIGUEL A·Filed 2004·Application pending·0 cites
- 3232US2017067163A1Multiple chamber chemical vapor deposition systemVEECO INSTR INC·Filed 2016·Application pending·0 cites
- 3332US2017256434A1Wafer handling assemblyVEECO INSTR INC·Filed 2016·Application pending·0 cites
- 3431US2017256436A1Wafer handling assemblyVEECO INSTR INC·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →