Inventor · disambiguated record

Tsai-Sheng Gao

Also filed as: GAO TSAI-SHENG

2 granted patents·20 citations·filing 1998–1998

59Inventor score

Technology areasG03F H10P

Files withIND TECH RES INST2

Top patents by PatentIndex Score

2 records

0147US6162591APhotolithography process with gas-phase pretreatmentIND TECH RES INST·Filed 1998·Granted Dec 19, 2000·12 cites·8 claims
0235US6106167AApparatus for photolithography process with gas-phase pretreatmentIND TECH RES INST·Filed 1998·Granted Aug 22, 2000·8 cites·24 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →