Inventor · disambiguated record
Dale K. Stone
Also filed as: STONE DALE · STONE DALE K
26 granted patents·10 pending applications·234 citations·filing 1993–2020
95Inventor score
Files withVARIAN SEMICONDUCTOR EQUIPMENT ASS INC9AXCELIS TECH INC6VARIAN SEMICONDUCTOR EQUIPMENT5EATON CORP3APPLIED MATERIALS INC2
Top patents by PatentIndex Score
36 records- 0186US9692325B2High conductivity electrostatic chuckSUURONEN DAVID·Filed 2011·Granted Jun 27, 2017·10 cites·25 claims
- 0284US5436790AWafer sensing and clamping monitorEATON CORP·Filed 1993·Granted Jul 25, 1995·99 cites·9 claims
- 0381US7751172B2Sliding wafer release gripper/wafer peeling gripperAXCELIS TECH INC·Filed 2006·Granted Jul 6, 2010·11 cites·15 claims
- 0481US6583428B1Apparatus for the backside gas cooling of a wafer in a batch ion implantation systemAXCELIS TECH INC·Filed 2000·Granted Jun 24, 2003·28 cites·21 claims
- 0580US9025305B2High surface resistivity electrostatic chuckCOOKE RICHARD A·Filed 2011·Granted May 5, 2015·5 cites·14 claims
- 0678US9644269B2Diffusion resistant electrostatic clampVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted May 9, 2017·3 cites·14 claims
- 0775US8531814B2Removal of charge between a substrate and an electrostatic clampSTONE DALE K·Filed 2010·Granted Sep 10, 2013·4 cites·8 claims
- 0875US5656092AApparatus for capturing and removing contaminant particles from an interior region of an ion implanterEATON CORP·Filed 1995·Granted Aug 12, 1997·27 cites·12 claims
- 0973US7381969B2Load lock controlAXCELIS TECH INC·Filed 2006·Granted Jun 3, 2008·6 cites·11 claims
- 1073US5670217AMethod for capturing and removing contaminant particles from an interior region of an ion implanterEATON CORP·Filed 1996·Granted Sep 23, 1997·24 cites·10 claims
- 1166US8598021B2Method for junction avoidance on edge of workpiecesBLAKE JULIAN·Filed 2011·Granted Dec 3, 2013·2 cites·5 claims
- 1264US9953849B2Platen for reducing particle contamination on a substrate and a method thereofVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted Apr 24, 2018·1 cites·13 claims
- 1363US7151658B2High-performance electrostatic clamp comprising a resistive layer, micro-grooves, and dielectric layerAXCELIS TECH INC·Filed 2003·Granted Dec 19, 2006·8 cites·46 claims
- 1461US11631588B2Method and apparatus for non line-of-sight dopingVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2020·Granted Apr 18, 2023·0 cites·20 claims
- 1561US7173260B2Removing byproducts of physical and chemical reactions in an ion implanterAXCELIS TECH INC·Filed 2004·Granted Feb 6, 2007·5 cites·24 claims
- 1657US11473978B2Enhanced substrate temperature measurement apparatus, system and methodAPPLIED MATERIALS INC·Filed 2019·Granted Oct 18, 2022·0 cites·15 claims
- 1757US10541137B2Method and apparatus for non line-of-sight dopingVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Jan 21, 2020·0 cites·14 claims
- 1856US10385454B2Diffusion resistant electrostatic clampVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Aug 20, 2019·0 cites·17 claims
- 1955US10658207B2Platen for reducing particle contamination on a substrate and a method thereofVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted May 19, 2020·0 cites·11 claims
- 2055US2019252230A1Plasma resistant electrostatic clampVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2019·Application pending·0 cites
- 2152US2015228524A1Plasma resistant electrostatic clampVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2014·Application pending·0 cites
- 2247US7715170B2Electrostatic chuck with separated electrodesVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted May 11, 2010·0 cites·17 claims
- 2347US2009122458A1Embossed electrostatic chuckVARIAN SEMICONDUCTOR EPUIPMENT·Filed 2008·Application pending·0 cites
- 2446US2009179158A1In-vacuum protective linersVARIAN SEMICONDUCTOR EQUPIMENT·Filed 2009·Application pending·0 cites
- 2546US2010140508A1Coated graphite linersBLAKE JULIAN G·Filed 2008·Application pending·0 cites
- 2645US2011036990A1Platen to control charge accumulationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2009·Application pending·0 cites
- 2744US10157764B2Thermal shield for electrostatic chuckVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted Dec 18, 2018·0 cites·19 claims
- 2844US9633875B2Apparatus for improving temperature uniformity of a workpieceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Apr 25, 2017·0 cites·20 claims
- 2944US7205556B2Bellows liner for an ion beam implanterAXCELIS TECH INC·Filed 2004·Granted Apr 17, 2007·1 cites·19 claims
- 3041US8681472B2Platen ground pin for connecting substrate to groundSUURONEN DAVID E·Filed 2009·Granted Mar 25, 2014·0 cites·8 claims
- 3141US2020381271A1System and apparatus for enhanced substrate heating and rapid substrate coolingAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 3241US2014318455A1Low emissivity electrostatic chuckVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Application pending·0 cites
- 3340US2009003979A1Techniques for handling substratesVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Application pending·0 cites
- 3439US8672311B2Method of cooling textured workpieces with an electrostatic chuckSTONE DALE K·Filed 2010·Granted Mar 18, 2014·0 cites·13 claims
- 3536US9082804B2Triboelectric charge controlled electrostatic clampBLAKE JULIAN·Filed 2011·Granted Jul 14, 2015·0 cites·16 claims
- 3634US2012017938A1Platen cleaningWEAVER WILLIAM T·Filed 2011·Application pending·0 cites
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