Inventor · disambiguated record
Matthew Vanhanehem
Also filed as: VANHANEHEM MATTHEW · VANHANEHEM MATTHEW R
5 granted patents·2 pending applications·59 citations·filing 2001–2005
79Inventor score
Top patents by PatentIndex Score
7 records- 0181US7056829B2Polishing composition for semiconductor wafersROHM & HAAS ELECT MAT·Filed 2005·Granted Jun 6, 2006·4 cites·10 claims
- 0279US6419553B2Methods for break-in and conditioning a fixed abrasive polishing padRODEL INC·Filed 2001·Granted Jul 16, 2002·19 cites·2 claims
- 0377US6916742B2Modular barrier removal polishing slurryROHM & HAAS ELECT MAT·Filed 2003·Granted Jul 12, 2005·23 cites·16 claims
- 0467US7300480B2High-rate barrier polishing compositionROHM & HAAS ELECT MAT·Filed 2003·Granted Nov 27, 2007·13 cites·5 claims
- 0548US2005056810A1Polishing composition for semiconductor wafersFiled 2003·Application pending·0 cites
- 0636US2002173235A1Methods for break-in and conditioning a fixed abrasive polishing padFiled 2002·Application pending·0 cites
- 0734US6843708B2Method of reducing defectivity during chemical mechanical planarizationROHM & HAAS ELECT MAT·Filed 2003·Granted Jan 18, 2005·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →