Inventor · disambiguated record
Stephen Moffatt
Also filed as: MOFFATT STEPHEN
86 granted patents·27 pending applications·1,103 citations·filing 1987–2023
99Inventor score
Top patents by PatentIndex Score
113 records- 0199US8404499B2LED substrate processingMOFFATT STEPHEN·Filed 2010·Granted Mar 26, 2013·480 cites·25 claims
- 0297US8148663B2Apparatus and method of improving beam shaping and beam homogenizationADAMS BRUCE E·Filed 2007·Granted Apr 3, 2012·45 cites·14 claims
- 0397US7800081B2Pulse train annealing method and apparatusAPPLIED MATERIALS INC·Filed 2008·Granted Sep 21, 2010·41 cites·16 claims
- 0496US11348769B2Plasma-enhanced anneal chamber for wafer outgassingAPPLIED MATERIALS INC·Filed 2020·Granted May 31, 2022·5 cites·12 claims
- 0595US8829392B2Apparatus and method of improving beam shaping and beam homogenizationADAMS BRUCE E·Filed 2012·Granted Sep 9, 2014·15 cites·11 claims
- 0693USD959490SDisplay screen or portion thereof with graphical user interfaceAPPLIED MATERIALS INC·Filed 2020·Granted Aug 2, 2022·36 cites·1 claims
- 0791US7372690B2Substrate holder which is self-adjusting for substrate deformationAPPLIED MATERIALS INC·Filed 2005·Granted May 13, 2008·15 cites·30 claims
- 0890US11735447B2Enhanced process and hardware architecture to detect and correct realtime product substratesAPPLIED MATERIALS INC·Filed 2020·Granted Aug 22, 2023·2 cites·20 claims
- 0990US9908200B2Apparatus and method of improving beam shaping and beam homogenizationAPPLIED MATERIALS INC·Filed 2014·Granted Mar 6, 2018·6 cites·20 claims
- 1090US8518838B2Method of thermal processing structures formed on a substrateCAREY PAUL·Filed 2012·Granted Aug 27, 2013·10 cites·20 claims
- 1190US8150242B2Use of infrared camera for real-time temperature monitoring and controlMERRY NIR·Filed 2008·Granted Apr 3, 2012·14 cites·16 claims
- 1290US5969366AIon implanter with post mass selection decelerationAPPLIED MATERIALS INC·Filed 1996·Granted Oct 19, 1999·67 cites·18 claims
- 1389US11981999B2Supplemental energy for low temperature processesAPPLIED MATERIALS INC·Filed 2021·Granted May 14, 2024·1 cites·23 claims
- 1488US9123527B2Apparatus and methods for pulsed photo-excited deposition and etchAPPLIED MATERIALS INC·Filed 2014·Granted Sep 1, 2015·6 cites·19 claims
- 1587US11586794B2Semiconductor processing tools with improved performance by use of hybrid learning modelsAPPLIED MATERIALS INC·Filed 2020·Granted Feb 21, 2023·2 cites·17 claims
- 1687US9498845B2Pulse train annealing method and apparatusAPPLIED MATERIALS INC·Filed 2012·Granted Nov 22, 2016·6 cites·5 claims
- 1787US7075165B2Embedded waveguide detectorsAPPLIED MATERIAL INC·Filed 2004·Granted Jul 11, 2006·31 cites·14 claims
- 1887US6100536AElectron flood apparatus for neutralizing charge build-up on a substrate during ion implantationAPPLIED MATERIALS INC·Filed 1998·Granted Aug 8, 2000·51 cites·21 claims
- 1987US5883391AIon implantation apparatus and a method of monitoring high energy neutral contamination in an ion implantation processAPPLIED MATERIALS INC·Filed 1997·Granted Mar 16, 1999·51 cites·14 claims
- 2086US9018110B2Apparatus and methods for microwave processing of semiconductor substratesSTOWELL MICHAEL W·Filed 2012·Granted Apr 28, 2015·7 cites·18 claims
- 2186US8906725B2Crystallization processing for semiconductor applicationsAPPLIED MATERIALS INC·Filed 2014·Granted Dec 9, 2014·4 cites·18 claims
- 2286US7569463B2Method of thermal processing structures formed on a substrateAPPLIED MATERIALS INC·Filed 2006·Granted Aug 4, 2009·9 cites·25 claims
- 2385US4825087ASystem and methods for wafer charge reduction for ion implantationAPPLIED MATERIALS INC·Filed 1987·Granted Apr 25, 1989·36 cites·14 claims
- 2484US10109514B2Visual feedback for process control in RTP chambersAPPLIED MATERIALS INC·Filed 2017·Granted Oct 23, 2018·3 cites·22 claims
- 2584US7795816B2High speed phase scrambling of a coherent beam using plasmaAPPLIED MATERIALS INC·Filed 2007·Granted Sep 14, 2010·8 cites·17 claims
- 2683US9499909B2Methods for photo-excitation of precursors in epitaxial processes using a rotary scanning unitAPPLIED MATERIALS INC·Filed 2014·Granted Nov 22, 2016·4 cites·4 claims
- 2782US6909588B2Substrate holder for retaining a substrate within a processing chamberAPPLIED MATERIALS INC·Filed 2003·Granted Jun 21, 2005·21 cites·34 claims
- 2881US9341858B2Apparatus and method for speckle reduction in laser processing equipmentAPPLIED MATERIALS INC·Filed 2014·Granted May 17, 2016·3 cites·10 claims
- 2981US9114479B2Managing thermal budget in annealing of substratesAPPLIED MATERIALS INC·Filed 2014·Granted Aug 25, 2015·3 cites·11 claims
- 3080US9069183B2Apparatus and method for speckle reduction in laser processing equipmentAPPLIED MATERIALS INC·Filed 2012·Granted Jun 30, 2015·3 cites·12 claims
- 3180US8314369B2Managing thermal budget in annealing of substratesMOFFATT STEPHEN·Filed 2008·Granted Nov 20, 2012·6 cites·20 claims
- 3280US7947584B2Suitably short wavelength light for laser annealing of silicon in DSA type systemsAPPLIED MATERIALS INC·Filed 2008·Granted May 24, 2011·5 cites·24 claims
- 3379US9909925B2Apparatus and method to measure temperature of 3D semiconductor structures via laser diffractionPAN HENG·Filed 2012·Granted Mar 6, 2018·5 cites·9 claims
- 3478US9735034B2Visual feedback for process control in RTP chambersAPPLIED MATERIALS INC·Filed 2014·Granted Aug 15, 2017·3 cites·17 claims
- 3578US8785815B2Aperture control of thermal processing radiationSADE AMIKAM·Filed 2012·Granted Jul 22, 2014·4 cites·18 claims
- 3678US7151881B2Impurity-based waveguide detectorsAPPLIED MATERIALS INC·Filed 2004·Granted Dec 19, 2006·22 cites·31 claims
- 3776US8724976B2Use of infrared camera for real-time temperature monitoring and controlMERRY NIR·Filed 2012·Granted May 13, 2014·3 cites·20 claims
- 3874US11077410B2Gas injector with baffleAPPLIED MATERIALS INC·Filed 2018·Granted Aug 3, 2021·1 cites·19 claims
- 3974US8970963B2Multiple beam combiner for laser processing apparatusMOFFATT STEPHEN·Filed 2012·Granted Mar 3, 2015·2 cites·6 claims
- 4074US8363320B2Method and apparatus for decorrelation of spatially and temporally coherent lightAPPLIED MATERIALS INC·Filed 2011·Granted Jan 29, 2013·2 cites·20 claims
- 4174US8247317B2Methods of solid phase recrystallization of thin film using pulse train annealing methodMOFFATT STEPHEN·Filed 2010·Granted Aug 21, 2012·3 cites·8 claims
- 4272US12186832B2Pulse train annealing method and apparatusAPPLIED MATERIALS INC·Filed 2021·Granted Jan 7, 2025·0 cites·18 claims
- 4372US10141191B2Method of thermal processing structures formed on a substrateCAREY PAUL·Filed 2010·Granted Nov 27, 2018·2 cites·17 claims
- 4472US9290858B2Crystallization processing for semiconductor applicationsAPPLIED MATERIALS INC·Filed 2014·Granted Mar 22, 2016·1 cites·20 claims
- 4571US8569187B2Thermal processing apparatusMOFFATT STEPHEN·Filed 2011·Granted Oct 29, 2013·2 cites·18 claims
- 4671US7745309B2Methods for surface activation by plasma immersion ion implantation process utilized in silicon-on-insulator structureAPPLIED MATERIALS INC·Filed 2006·Granted Jun 29, 2010·5 cites·23 claims
- 4770US8692151B2Laser beam positioning systemTERTITSKI LEONID M·Filed 2011·Granted Apr 8, 2014·3 cites·13 claims
- 4870US8372667B2Fiber laser substrate processingAPPLIED MATERIALS INC·Filed 2010·Granted Feb 12, 2013·2 cites·17 claims
- 4970US8313965B2Crystallization processing for semiconductor applicationsMOFFATT STEPHEN·Filed 2010·Granted Nov 20, 2012·1 cites·4 claims
- 5068US11947888B2Semiconductor processing tools with improved performance by use of hybrid learning modelsAPPLIED MATERIALS INC·Filed 2023·Granted Apr 2, 2024·0 cites·15 claims
Showing the top 50 of 113 patent records by PatentIndex Score.
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