Inventor · disambiguated record
Akira Hayashida
Also filed as: HAYASHIDA AKIRA
51 granted patents·1 pending application·1,010 citations·filing 1978–2018
98Inventor score
Top patents by PatentIndex Score
52 records- 0196US8501599B2Substrate processing apparatus and substrate processing methodUENO MASAAKI·Filed 2007·Granted Aug 6, 2013·470 cites·19 claims
- 0291US8148271B2Substrate processing apparatus, coolant gas supply nozzle and semiconductor device manufacturing methodUENO MASAAKI·Filed 2006·Granted Apr 3, 2012·22 cites·20 claims
- 0389US4849196AProcess for producing silicon carbide whiskersSHINETSU CHEMICAL CO·Filed 1987·Granted Jul 18, 1989·57 cites·13 claims
- 0487US4604367AMethod for the preparation of an inorganic fiber containing silicon, carbon, boron and nitrogenSHINETSU CHEMICAL CO·Filed 1984·Granted Aug 5, 1986·37 cites·8 claims
- 0585US4981666AMethod for the preparation of silicon carbide whiskersSHINETSU CHEMICAL CO·Filed 1986·Granted Jan 1, 1991·33 cites·6 claims
- 0682US4571331AUltrafine powder of silicon carbide, a method for the preparation thereof and a sintered body therefromSHINETSU CHEMICAL CO·Filed 1983·Granted Feb 18, 1986·38 cites·3 claims
- 0779US4869854AProcess for manufacturing organic silazane polymers and ceramics therefromSHINETSU CHEMICAL CO·Filed 1987·Granted Sep 26, 1989·29 cites·23 claims
- 0878US7727780B2Substrate processing method and semiconductor manufacturing apparatusHITACHI INT ELECTRIC INC·Filed 2008·Granted Jun 1, 2010·6 cites·19 claims
- 0976US7700054B2Substrate processing apparatus having gas side flow via gas inletHITACHI INT ELECTRIC INC·Filed 2007·Granted Apr 20, 2010·5 cites·12 claims
- 1076US4550151AOrganoborosilicon polymer and a method for the preparation thereofSHINETSU CHEMICAL CO·Filed 1984·Granted Oct 29, 1985·23 cites·4 claims
- 1175US8507296B2Substrate processing method and film forming methodUENO MASAAKI·Filed 2009·Granted Aug 13, 2013·4 cites·16 claims
- 1275US4958040AProcess for the preparation of diorganohalogenosilanesSHINETSU CHEMICAL CO·Filed 1989·Granted Sep 18, 1990·11 cites·17 claims
- 1375US4847345AProcess for manufacturing organic silazane polymers and ceramics therefromSHINETSU CHEMICAL CO·Filed 1988·Granted Jul 11, 1989·22 cites·23 claims
- 1474US4657991APrecursor composition of silicon carbideSHINETSU CHEMICAL CO·Filed 1985·Granted Apr 14, 1987·25 cites·4 claims
- 1573US4771118AProcess for manufacturing organic silazane polymers and process for manufacturing ceramics from the polymersSHINETSU CHEMICAL CO·Filed 1986·Granted Sep 13, 1988·20 cites·11 claims
- 1672US4948763APreparation of hollow ceramic fibersSHINETSU CHEMICAL CO·Filed 1989·Granted Aug 14, 1990·23 cites·20 claims
- 1770US5599892APreparation of polysilanesSHINETSU CHEMICAL CO·Filed 1995·Granted Feb 4, 1997·21 cites·26 claims
- 1868US7863204B2Substrate processing apparatus, heating apparatus for use in the same, method of manufacturing semiconductors with those apparatuses, and heating element supporting structureHITACHI INT ELECTRIC INC·Filed 2006·Granted Jan 4, 2011·3 cites·22 claims
- 1967US8158911B2Heating apparatus, substrate processing apparatus employing the same, method of manufacturing semiconductor devices, and extending memberHAYASHIDA AKIRA·Filed 2008·Granted Apr 17, 2012·3 cites·19 claims
- 2063US8116618B2Heating apparatus, substrate processing apparatus, and method of manufacturing semiconductor devicesHAYASHIDA AKIRA·Filed 2008·Granted Feb 14, 2012·2 cites·14 claims
- 2160US4762810AMethod for the preparation of a sintered body of silicon carbideSHINETSU CHEMICAL CO·Filed 1987·Granted Aug 9, 1988·16 cites·2 claims
- 2258US9184069B2Heating apparatus, substrate processing apparatus employing the same, method of manufacturing semiconductor devices, and insulatorHAYASHIDA AKIRA·Filed 2008·Granted Nov 10, 2015·1 cites·18 claims
- 2358US4975392AMethod for manufacturing silicon carbide whiskerSHINETSU CHEMICAL CO·Filed 1989·Granted Dec 4, 1990·13 cites·18 claims
- 2457US6143409APolycarbodiimide resin-containing adhesive and flexible printed circuit boardSHINETSU CHEMICAL CO·Filed 1998·Granted Nov 7, 2000·17 cites·10 claims
- 2554US8734148B2Heat treatment apparatus and method of manufacturing semiconductor deviceYAMAZAKI KEISHIN·Filed 2011·Granted May 27, 2014·1 cites·6 claims
- 2653US5916675APolycarbodiimide resin-containing adhesive and flexible printed circuit boardSHINETSU CHEMICAL CO·Filed 1997·Granted Jun 29, 1999·15 cites·4 claims
- 2752US5075474AMethod for preparing hexamethyl cyclotrisilazaneSHINETSU CHEMICAL CO·Filed 1991·Granted Dec 24, 1991·5 cites·6 claims
- 2852US4246178ATetrahydropyran-5-one compoundsSHINETSU CHEMICAL CO·Filed 1978·Granted Jan 20, 1981·2 cites·4 claims
- 2950US10789141B2Information processing device and information processing methodFUJITSU LTD·Filed 2018·Granted Sep 29, 2020·0 cites·13 claims
- 3048US5237033APreparation of polysilanesSHINETSU CHEMICAL CO·Filed 1992·Granted Aug 17, 1993·6 cites·15 claims
- 3147US5041515AMethods for preparing polytitanocarbosilazane polymers and ceramics therefromSHINETSU CHEMICAL CO·Filed 1990·Granted Aug 20, 1991·6 cites·5 claims
- 3247US2009095422A1Semiconductor manufacturing apparatus and substrate processing methodHITACHI INT ELECTRIC INC·Filed 2008·Application pending·0 cites
- 3346US5750636AProcess for the preparation of a high-molecular-weight polycarbodiimide solutionSHINETSU CHEMICAL CO·Filed 1996·Granted May 12, 1998·8 cites·7 claims
- 3445US5804257APolysilane compositionsSHINETSU CHEMICAL CO·Filed 1995·Granted Sep 8, 1998·6 cites·15 claims
- 3545US5162477APreparation of polyorganosilanesSHINETSU CHEMICAL CO·Filed 1991·Granted Nov 10, 1992·5 cites·5 claims
- 3645US4870035AProcess for manufacturing organic silazane polymers and process for manufacturing ceramics from the polymersSHINETSU CHEMICAL CO·Filed 1988·Granted Sep 26, 1989·7 cites·13 claims
- 3744US5821325APolycarbodiimide derivatives and method for preparing the sameSHINETSU CHEMICAL CO·Filed 1996·Granted Oct 13, 1998·7 cites·10 claims
- 3844US5296418AMethod for manufacturing a hafnium-containing silazane polymer and a method for manufacturing a ceramic from said polymerSHINETSU CHEMICAL CO·Filed 1992·Granted Mar 22, 1994·4 cites·5 claims
- 3942US5011639AMethod for the preparation of a sintered body of silicon carbideSHINETSU CHEMICAL CO·Filed 1989·Granted Apr 30, 1991·12 cites·7 claims
- 4041US8838952B2Information processing apparatus with secure boot capability capable of verification of configuration changeHAYASHIDA AKIRA·Filed 2011·Granted Sep 16, 2014·0 cites·4 claims
- 4139US5210058AMethod for preparing organic silazane polymers and method for preparing ceramics from the polymersSHINETSU CHEMICAL CO·Filed 1991·Granted May 11, 1993·3 cites·10 claims
- 4239US5128430APreparation of polysilanesSHINETSU CHEMICAL CO·Filed 1991·Granted Jul 7, 1992·3 cites·3 claims
- 4338US5200371AMethod for preparing organic silazane polymers and method for preparing ceramics from the polymersSHINETSU CHEMICAL CO·Filed 1990·Granted Apr 6, 1993·3 cites·1 claims
- 4437US5750637AProcess for the preparation of a polycarbodiimide solutionSHINETSU CHEMICAL CO·Filed 1996·Granted May 12, 1998·4 cites·7 claims
- 4536US5837801AMethod for preparing crosslinked polycarbodiimidesSHINETSU CHEMICAL CO·Filed 1996·Granted Nov 17, 1998·4 cites·7 claims
- 4635US5770661APolycarbodiimide derivative and process for producing the sameSHINETSU CHEMICAL CO·Filed 1997·Granted Jun 23, 1998·3 cites·8 claims
- 4732US5580912APolysilane compositionsSHINETSU CHEMICAL CO·Filed 1995·Granted Dec 3, 1996·2 cites·18 claims
- 4831US5183875AMethod for manufacturing a hafnium-containing silazane polymer and a method for manufacturing a ceramic from said polymerSHINETSU CHEMICAL CO·Filed 1990·Granted Feb 2, 1993·0 cites·10 claims
- 4930US5157096AMethod and apparatus for preparing organic silazane polymer and method for preparing inorganic fibersSHINETSU CHEMICAL CO·Filed 1990·Granted Oct 20, 1992·0 cites·1 claims
- 5030US5008348AInfusibilization of organic silazane polymersSHINETSU CHEMICAL CO·Filed 1989·Granted Apr 16, 1991·1 cites·20 claims
Showing the top 50 of 52 patent records by PatentIndex Score.
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