Inventor · disambiguated record
Daniel Mateja
Also filed as: MATEJA DANIEL
3 granted patents·6 citations·filing 2013–2013
58Inventor score
Technology areasH10P
Files withCABOT MICROELECTRONICS CORP3
Top patents by PatentIndex Score
3 records- 0173US8916061B2CMP compositions selective for oxide and nitride with high removal rate and low defectivityCABOT MICROELECTRONICS CORP·Filed 2013·Granted Dec 23, 2014·4 cites·16 claims
- 0258US9850402B2CMP compositions and methods for selective removal of silicon nitrideCABOT MICROELECTRONICS CORP·Filed 2013·Granted Dec 26, 2017·1 cites·18 claims
- 0358US9303187B2Compositions and methods for CMP of silicon oxide, silicon nitride, and polysilicon materialsCABOT MICROELECTRONICS CORP·Filed 2013·Granted Apr 5, 2016·1 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →