Inventor · disambiguated record
Masamitsu Shinozuka
Also filed as: SHINOZUKA MASAMITSU
4 granted patents·1 pending application·29 citations·filing 2001–2025
73Inventor score
Technology areasH10P
Files withSUMITOMO EATON NOVA2SUMITOMO HEAVY INDUSTRIES ION TECH CO LTD2SEN CORP AN SHI AND AXCELIS CO1
Top patents by PatentIndex Score
5 records- 0175US10896843B2Wafer holding device and wafer chucking and dechucking methodSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2018·Granted Jan 19, 2021·2 cites·18 claims
- 0271US7187143B2Mover device and semiconductor manufacturing apparatus and methodSUMITOMO EATON NOVA·Filed 2004·Granted Mar 6, 2007·16 cites·48 claims
- 0367US7597531B2Method of controlling mover deviceSEN CORP AN SHI AND AXCELIS CO·Filed 2005·Granted Oct 6, 2009·3 cites·9 claims
- 0457US6547504B2Wafer carrying system and carrying method thereofSUMITOMO EATON NOVA·Filed 2001·Granted Apr 15, 2003·8 cites·26 claims
- 0555US2025279257A1Ion implanter and ion implantation methodSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2025·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →