Inventor · disambiguated record
Suguru Hirokawa
Also filed as: HIROKAWA SUGURU
6 granted patents·97 citations·filing 1995–2018
81Inventor score
Files withEATON CORP2SEN CORP AN SHI AND AXCELIS CO1SUMITOMO EATON NOVA1SUMITOMO HEAVY IND ION TECH CO LTD1SUMITOMO HEAVY INDUSTRIES ION TECH CO LTD1
Top patents by PatentIndex Score
6 records- 0175US10896843B2Wafer holding device and wafer chucking and dechucking methodSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2018·Granted Jan 19, 2021·2 cites·18 claims
- 0274US5608223AIon implantation deviceEATON CORP·Filed 1995·Granted Mar 4, 1997·50 cites·11 claims
- 0371US7187143B2Mover device and semiconductor manufacturing apparatus and methodSUMITOMO EATON NOVA·Filed 2004·Granted Mar 6, 2007·16 cites·48 claims
- 0467US7597531B2Method of controlling mover deviceSEN CORP AN SHI AND AXCELIS CO·Filed 2005·Granted Oct 6, 2009·3 cites·9 claims
- 0556US5525807AIon implantation deviceEATON CORP·Filed 1995·Granted Jun 11, 1996·26 cites·9 claims
- 0630US9666413B2Ion implantation apparatus and control method for ion implantation apparatusSUMITOMO HEAVY IND ION TECH CO LTD·Filed 2015·Granted May 30, 2017·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →