Inventor · disambiguated record
Mitsukuni Tsukihara
Also filed as: TSUKIHARA MITSUKUNI
26 granted patents·1 pending application·310 citations·filing 1999–2022
96Inventor score
Files withSUMITOMO EATON NOVA7SEN CORP AN SHI AND AXCELIS CO6SEN CORP5SEN CORP AN SHI & AXCELIS CO5SUMITOMO HEAVY IND ION TECH CO LTD2
Top patents by PatentIndex Score
27 records- 0191US6573517B1Ion implantation apparatusSUMITOMO EATON NOVA·Filed 2000·Granted Jun 3, 2003·46 cites·14 claims
- 0290US7351987B2Irradiation system with ion beamSEN CORP AN SHI & AXCELIS CO·Filed 2005·Granted Apr 1, 2008·20 cites·13 claims
- 0387US7429743B2Irradiation system ion beam and method to enhance accuracy of irradiationSEN CORP AN SHI & AXCELIS CO·Filed 2005·Granted Sep 30, 2008·13 cites·44 claims
- 0487US6242747B1Method and system for optimizing linac operational parametersAXCELIS TECH INC·Filed 1999·Granted Jun 5, 2001·55 cites·20 claims
- 0586US9502210B2Ion implanter, ion implantation method, and beam measurement apparatusSUMITOMO HEAVY IND ION TECH CO LTD·Filed 2015·Granted Nov 22, 2016·5 cites·24 claims
- 0686US7361892B2Method to increase low-energy beam current in irradiation system with ion beamSEN CORP·Filed 2005·Granted Apr 22, 2008·12 cites·18 claims
- 0785US7276711B2Beam space-charge compensation device and ion implantation system having the sameSEN CORP AN SHI AND AXCELIS CO·Filed 2005·Granted Oct 2, 2007·11 cites·12 claims
- 0885US6794661B2Ion implantation apparatus capable of increasing beam currentSUMITOMO EATON NOVA·Filed 2002·Granted Sep 21, 2004·37 cites·40 claims
- 0984US7138641B2Beam deflecting method, beam deflector for scanning, ion implantation method, and ion implantation systemSUMITOMO EATON NOVA·Filed 2005·Granted Nov 21, 2006·8 cites·39 claims
- 1081US7755067B2Ion implantation apparatus and method of converging/shaping ion beam used thereforSEN CORP·Filed 2008·Granted Jul 13, 2010·6 cites·19 claims
- 1180US7982192B2Beam processing apparatusSEN CORP AN SHI & AXCELIS CO·Filed 2008·Granted Jul 19, 2011·6 cites·14 claims
- 1280US7851772B2Ion implantation apparatus and ion implantation methodSEN CORP AN SHI & AXCELIS CO·Filed 2008·Granted Dec 14, 2010·6 cites·10 claims
- 1380US7315034B2Irradiation system with ion beam/charged particle beamSEN CORP AN SHI AND AXCELIS CO·Filed 2005·Granted Jan 1, 2008·7 cites·18 claims
- 1479US9449791B2Beam irradiation apparatus and beam irradiation methodSUMITOMO HEAVY IND ION TECH CO LTD·Filed 2015·Granted Sep 20, 2016·4 cites·22 claims
- 1579US7304319B2Wafer charge compensation device and ion implantation system having the sameSEN CORP AN SHI AND AXCELIS CO·Filed 2005·Granted Dec 4, 2007·7 cites·18 claims
- 1678US6984833B2Ion implanter and method for controlling the sameSUMITOMO EATON NOVA·Filed 2004·Granted Jan 10, 2006·14 cites·24 claims
- 1777US6797968B2Ion beam processing method and apparatus thereforSUMITOMO EATON NOVA·Filed 2002·Granted Sep 28, 2004·15 cites·72 claims
- 1875US7718980B2Beam processing system and beam processing methodSEN CORP·Filed 2007·Granted May 18, 2010·5 cites·8 claims
- 1971US7187143B2Mover device and semiconductor manufacturing apparatus and methodSUMITOMO EATON NOVA·Filed 2004·Granted Mar 6, 2007·16 cites·48 claims
- 2070US7791049B2Ion implantation apparatusSEN CORP AN SHI AND AXCELIS CO·Filed 2008·Granted Sep 7, 2010·3 cites·6 claims
- 2169US7687782B2Electrostatic beam deflection scanner and beam deflection scanning methodSEN CORP AN SHI AND AXCELIS CO·Filed 2007·Granted Mar 30, 2010·3 cites·15 claims
- 2269US6635889B2Ion implantation apparatus suited for low energy ion implantation and tuning method for ion source system thereofSUMITOMO EATON NOVA·Filed 2002·Granted Oct 21, 2003·7 cites·20 claims
- 2367US7597531B2Method of controlling mover deviceSEN CORP AN SHI AND AXCELIS CO·Filed 2005·Granted Oct 6, 2009·3 cites·9 claims
- 2463US8759801B2Ion implantation apparatus and ion implantation methodSEN CORP·Filed 2012·Granted Jun 24, 2014·1 cites·9 claims
- 2554US2022285126A1Ion implanter and ion implantation methodSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2022·Application pending·0 cites
- 2646US9208996B2Ion implantation apparatus and ion implantation methodSEN CORP·Filed 2013·Granted Dec 8, 2015·0 cites·28 claims
- 2739US7411709B2Beam processing system and beam processing methodSEN CORP AN SHI & AXCELIS CO·Filed 2007·Granted Aug 12, 2008·0 cites·26 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →