Inventor · disambiguated record
Yang Yang
Also filed as: YANG YANG LI
70 granted patents·36 pending applications·199 citations·filing 2012–2025
98Inventor score
Top patents by PatentIndex Score
106 records- 0198US11651966B2Methods and apparatus for processing a substrateAPPLIED MATERIALS INC·Filed 2021·Granted May 16, 2023·6 cites·9 claims
- 0298US11476090B1Voltage pulse time-domain multiplexingAPPLIED MATERIALS INC·Filed 2021·Granted Oct 18, 2022·14 cites·26 claims
- 0397US10957518B2Chamber with individually controllable plasma generation regions for a reactor for processing a workpieceAPPLIED MATERIALS INC·Filed 2020·Granted Mar 23, 2021·4 cites·13 claims
- 0497US10707086B2Etching methodsAPPLIED MATERIALS INC·Filed 2019·Granted Jul 7, 2020·40 cites·20 claims
- 0596US12130561B2Gas distribution plate with UV blockerAPPLIED MATERIALS INC·Filed 2022·Granted Oct 29, 2024·2 cites·14 claims
- 0696US10544505B2Deposition or treatment of diamond-like carbon in a plasma reactorAPPLIED MATERIALS INC·Filed 2017·Granted Jan 28, 2020·12 cites·15 claims
- 0796US10475626B2Ion-ion plasma atomic layer etch process and reactorAPPLIED MATERIALS INC·Filed 2015·Granted Nov 12, 2019·12 cites·14 claims
- 0896US10249495B2Diamond like carbon layer formed by an electron beam plasma processAPPLIED MATERIALS INC·Filed 2016·Granted Apr 2, 2019·17 cites·16 claims
- 0996US8734664B2Method of differential counter electrode tuning in an RF plasma reactorAPPLIED MATERIALS INC·Filed 2013·Granted May 27, 2014·28 cites·19 claims
- 1094US11967483B2Plasma excitation with ion energy controlAPPLIED MATERIALS INC·Filed 2021·Granted Apr 23, 2024·2 cites·26 claims
- 1194US11721525B2Sensorless RF impedance matching networkAPPLIED MATERIALS INC·Filed 2021·Granted Aug 8, 2023·2 cites·20 claims
- 1291US12469680B2Radio-frequency (RF) matching network for fast impedance tuningAPPLIED MATERIALS INC·Filed 2023·Granted Nov 11, 2025·1 cites·17 claims
- 1391US12293897B2Radio frequency diverter assembly enabling on-demand different spatialAPPLIED MATERIALS INC·Filed 2023·Granted May 6, 2025·1 cites·19 claims
- 1490US12111341B2In-situ electric field detection method and apparatusAPPLIED MATERIALS INC·Filed 2022·Granted Oct 8, 2024·1 cites·12 claims
- 1590US11448977B1Gas distribution plate with UV blocker at the centerAPPLIED MATERIALS INC·Filed 2021·Granted Sep 20, 2022·1 cites·20 claims
- 1689US9613783B2Method and apparatus for controlling a magnetic field in a plasma chamberAPPLIED MATERIALS INC·Filed 2014·Granted Apr 4, 2017·7 cites·20 claims
- 1788US12368020B2Pulsed voltage source for plasma processing applicationsAPPLIED MATERIALS INC·Filed 2024·Granted Jul 22, 2025·1 cites·20 claims
- 1888US10115566B2Method and apparatus for controlling a magnetic field in a plasma chamberAPPLIED MATERIALS INC·Filed 2017·Granted Oct 30, 2018·4 cites·12 claims
- 1986US11043372B2High-density low temperature carbon films for hardmask and other patterning applicationsAPPLIED MATERIALS INC·Filed 2018·Granted Jun 22, 2021·4 cites·19 claims
- 2086US11043375B2Plasma deposition of carbon hardmaskAPPLIED MATERIALS INC·Filed 2018·Granted Jun 22, 2021·4 cites·19 claims
- 2185US11101113B2Ion-ion plasma atomic layer etch processAPPLIED MATERIALS INC·Filed 2019·Granted Aug 24, 2021·2 cites·18 claims
- 2285US10818472B2Methods of optical device fabrication using an electron beam apparatusAPPLIED MATERIALS INC·Filed 2019·Granted Oct 27, 2020·2 cites·20 claims
- 2385US10017857B2Method and apparatus for controlling plasma near the edge of a substrateAPPLIED MATERIALS INC·Filed 2016·Granted Jul 10, 2018·4 cites·19 claims
- 2485US9161428B2Independent control of RF phases of separate coils of an inductively coupled plasma reactorAPPLIED MATERIALS INC·Filed 2013·Granted Oct 13, 2015·11 cites·17 claims
- 2584US11043387B2Methods and apparatus for processing a substrateAPPLIED MATERIALS INC·Filed 2019·Granted Jun 22, 2021·2 cites·11 claims
- 2683US9449794B2Symmetrical inductively coupled plasma source with side RF feeds and spiral coil antennaAPPLIED MATERIALS INC·Filed 2014·Granted Sep 20, 2016·5 cites·15 claims
- 2782US12347647B2Plasma excitation with ion energy controlAPPLIED MATERIALS INC·Filed 2024·Granted Jul 1, 2025·0 cites·20 claims
- 2882US11469097B2Carbon hard masks for patterning applications and methods related theretoAPPLIED MATERIALS INC·Filed 2019·Granted Oct 11, 2022·2 cites·20 claims
- 2982US10167560B2Method and apparatus for structural coloration of metallic surfacesUNIV HONG KONG CHINESE·Filed 2017·Granted Jan 1, 2019·1 cites·20 claims
- 3081US12020901B2RF impedance matching networks for substrate processing platformAPPLIED MATERIALS INC·Filed 2021·Granted Jun 25, 2024·1 cites·20 claims
- 3181US2024426888A1In-situ electric field detection method and apparatusAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 3279US11609349B2Determining properties of a subterranean formation using an acoustic wave equation with a reflectivity parameterizationPGS GEOPHYSICAL AS·Filed 2020·Granted Mar 21, 2023·1 cites·18 claims
- 3379US10153139B2Multiple electrode substrate support assembly and phase control systemAPPLIED MATERIALS INC·Filed 2015·Granted Dec 11, 2018·2 cites·19 claims
- 3478US12469715B2Dry etching with etch byproduct self-cleaningAPPLIED MATERIALS INC·Filed 2023·Granted Nov 11, 2025·0 cites·12 claims
- 3577US11447868B2Method for controlling a plasma processAPPLIED MATERIALS INC·Filed 2017·Granted Sep 20, 2022·2 cites·8 claims
- 3676US12486577B2Pulsed plasma (DC/RF) deposition of high quality C films for patterningAPPLIED MATERIALS INC·Filed 2023·Granted Dec 2, 2025·0 cites·11 claims
- 3776US11430634B2Methods of optical device fabrication using an electron beam apparatusAPPLIED MATERIALS INC·Filed 2020·Granted Aug 30, 2022·0 cites·15 claims
- 3874US11784042B2Carbon hard masks for patterning applications and methods related theretoAPPLIED MATERIALS INC·Filed 2022·Granted Oct 10, 2023·0 cites·20 claims
- 3973US12195830B2Aluminum alloy, preparation method, and aluminum alloy structural memberBYD CO LTD·Filed 2019·Granted Jan 14, 2025·0 cites·20 claims
- 4072US12261019B2Voltage pulse time-domain multiplexingAPPLIED MATERIALS INC·Filed 2022·Granted Mar 25, 2025·0 cites·20 claims
- 4171US11972924B2Pulsed voltage source for plasma processing applicationsAPPLIED MATERIALS INC·Filed 2022·Granted Apr 30, 2024·0 cites·25 claims
- 4269US12505982B2Method and apparatus for digital control of ion energy distribution in a plasmaAPPLIED MATERIALS INC·Filed 2022·Granted Dec 23, 2025·0 cites·20 claims
- 4369US11462386B2Electron beam apparatus for optical device fabricationAPPLIED MATERIALS INC·Filed 2019·Granted Oct 4, 2022·0 cites·20 claims
- 4469US2023162996A1Etching apparatusAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 4568US11776788B2Pulsed voltage boost for substrate processingAPPLIED MATERIALS INC·Filed 2021·Granted Oct 3, 2023·0 cites·29 claims
- 4667US10784085B2Plasma processing reactor with a magnetic electron-blocking filter external of the chamber and uniform field within the chamberAPPLIED MATERIALS INC·Filed 2015·Granted Sep 22, 2020·1 cites·14 claims
- 4766US12463011B2Inductively coupled plasma source with radial coil networkAPPLIED MATERIALS INC·Filed 2023·Granted Nov 4, 2025·0 cites·20 claims
- 4866US12125689B2Methods and apparatus for toroidal plasma generationAPPLIED MATERIALS INC·Filed 2022·Granted Oct 22, 2024·0 cites·20 claims
- 4966US2021296131A1Methods and apparatus for processing a substrateAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 5065US12046449B2Methods and apparatus for processing a substrateAPPLIED MATERIALS INC·Filed 2022·Granted Jul 23, 2024·0 cites·20 claims
Showing the top 50 of 106 patent records by PatentIndex Score.
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