Inventor · disambiguated record
Masato Moriya
Also filed as: MORIYA MASATO
72 granted patents·16 pending applications·763 citations·filing 1993–2025
99Inventor score
Top patents by PatentIndex Score
88 records- 0196US5659420AConfocal optical apparatusKOMATSU MFG CO LTD·Filed 1994·Granted Aug 19, 1997·280 cites·9 claims
- 0295US8395133B2Apparatus and method of adjusting a laser light source for an EUV source deviceMORIYA MASATO·Filed 2009·Granted Mar 12, 2013·21 cites·27 claims
- 0395US8242472B2Extreme ultraviolet light source device and control method for extreme ultraviolet light source deviceMORIYA MASATO·Filed 2009·Granted Aug 14, 2012·37 cites·34 claims
- 0491US8957356B2System and method for generating extreme ultraviolet lightGIGAPHOTON INC·Filed 2012·Granted Feb 17, 2015·8 cites·13 claims
- 0591US8502178B2Extreme ultraviolet light source apparatus, method for controlling extreme ultraviolet light source apparatus, and recording medium with program recorded thereonMORIYA MASATO·Filed 2012·Granted Aug 6, 2013·12 cites·19 claims
- 0690US8399870B2Extreme ultraviolet light source device and control method for extreme ultraviolet light source deviceMORIYA MASATO·Filed 2012·Granted Mar 19, 2013·8 cites·17 claims
- 0788US9882343B2Narrow band laser apparatusGIGAPHOTON INC·Filed 2017·Granted Jan 30, 2018·5 cites·12 claims
- 0888US9667019B2Laser apparatus and extreme ultraviolet light generation systemGIGAPHOTON INC·Filed 2015·Granted May 30, 2017·4 cites·11 claims
- 0988US7923705B2Extreme ultra violet light source apparatusGIGAPHOTON INC·Filed 2009·Granted Apr 12, 2011·25 cites·30 claims
- 1086US11079686B2Excimer laser apparatus and electronic-device manufacturing methodGIGAPHOTON INC·Filed 2020·Granted Aug 3, 2021·2 cites·18 claims
- 1186US8198613B2Mirror for extreme ultra violet, manufacturing method for mirror for extreme ultra violet, and far ultraviolet light source deviceMORIYA MASATO·Filed 2009·Granted Jun 12, 2012·12 cites·55 claims
- 1285US8536550B2Method and apparatus for cleaning collector mirror in EUV light generatorASAYAMA TAKESHI·Filed 2009·Granted Sep 17, 2013·7 cites·15 claims
- 1385US7984744B2Foldable screen deviceSEIKI HANBAI CO LTD·Filed 2006·Granted Jul 26, 2011·25 cites·7 claims
- 1485US7891398B2Screen deviceSEIKI HANBAI CO LTD·Filed 2005·Granted Feb 22, 2011·17 cites·15 claims
- 1584US8256441B2Method for cleaning optical element of EUV light source device and optical element cleaning deviceMORIYA MASATO·Filed 2008·Granted Sep 4, 2012·15 cites·6 claims
- 1683US8847181B2System and method for generating extreme ultraviolet lightMORIYA MASATO·Filed 2012·Granted Sep 30, 2014·6 cites·11 claims
- 1783US8698114B2Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source, and method of adjusting laser light source device for extreme ultraviolet light source deviceGIGAPHOTON INC·Filed 2013·Granted Apr 15, 2014·4 cites·18 claims
- 1882US9277635B2Method for generating extreme ultraviolet light and device for generating extreme ultraviolet lightGIGAPHOTON INC·Filed 2015·Granted Mar 1, 2016·3 cites·10 claims
- 1980US10890484B2Wavelength measuring deviceGIGAPHOTON INC·Filed 2018·Granted Jan 12, 2021·2 cites·20 claims
- 2079US10920488B2Roll screen deviceSEIKI HANBAI CO LTD·Filed 2017·Granted Feb 16, 2021·5 cites·7 claims
- 2178US9099836B2Laser beam amplifier and laser apparatus using the sameGIGAPHOTON INC·Filed 2013·Granted Aug 4, 2015·2 cites·14 claims
- 2278US8536551B2Extreme ultra violet light source apparatusMORIYA MASATO·Filed 2009·Granted Sep 17, 2013·10 cites·14 claims
- 2378US8476609B2Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source device, and method for controlling saturable absorber used in extreme ultraviolet light source deviceENDO AKIRA·Filed 2011·Granted Jul 2, 2013·4 cites·20 claims
- 2477US9835495B2Light beam measurement device, laser apparatus, and light beam separatorGIGAPHOTON INC·Filed 2015·Granted Dec 5, 2017·2 cites·13 claims
- 2576US8592787B2Mirror for extreme ultra violet, manufacturing method for mirror for extreme ultra violet, and far ultraviolet light source deviceMORIYA MASATO·Filed 2012·Granted Nov 26, 2013·3 cites·39 claims
- 2676US6458203B1System for manufacturing a single-crystal ingot employing czochralski technique, and method of controlling the systemFiled 2000·Granted Oct 1, 2002·13 cites·9 claims
- 2775US9841684B2Light source apparatus and data processing methodGIGAPHOTON INC·Filed 2015·Granted Dec 12, 2017·2 cites·27 claims
- 2875US8173984B2Extreme ultraviolet light source apparatusMORIYA MASATO·Filed 2009·Granted May 8, 2012·8 cites·27 claims
- 2975US7472738B2Screen deviceSEIKI HANBAI CO LTD·Filed 2004·Granted Jan 6, 2009·25 cites·11 claims
- 3075US2025341444A1Deterioration estimation method, laser device, and electronic device manufacturing methodGIGAPHOTON INC·Filed 2025·Application pending·0 cites
- 3174US8212228B2Extreme ultra violet light source apparatusABE TAMOTSU·Filed 2009·Granted Jul 3, 2012·9 cites·16 claims
- 3273US9363878B2Device for controlling laser beam and apparatus for generating extreme ultraviolet light utilizing wavefront adjustersGIGAPHOTON INC·Filed 2014·Granted Jun 7, 2016·2 cites·17 claims
- 3373US6572699B1Method and apparatus for detecting melt levelKOMATSU DENSHI KINZOKU KK·Filed 2000·Granted Jun 3, 2003·16 cites·22 claims
- 3472US8294129B2Extreme ultraviolet light source apparatusMORIYA MASATO·Filed 2011·Granted Oct 23, 2012·3 cites·7 claims
- 3571US9301379B2Extreme ultraviolet light generation apparatusWATANABE YUKIO·Filed 2012·Granted Mar 29, 2016·3 cites·23 claims
- 3671US9184551B2Laser apparatus and extreme ultraviolet light generation systemGIGAPHOTON INC·Filed 2014·Granted Nov 10, 2015·2 cites·17 claims
- 3771US7196796B2Wavelength detecting apparatus, laser apparatus, and wavelength detecting methodGIGAPHOTON INC·Filed 2003·Granted Mar 27, 2007·10 cites·4 claims
- 3869US9439275B2System and method for generating extreme ultraviolet lightGIGAPHOTON INC·Filed 2015·Granted Sep 6, 2016·1 cites·11 claims
- 3969US7931070B2Sliding screen doorSEIKI HANBAI CO LTD·Filed 2004·Granted Apr 26, 2011·16 cites·5 claims
- 4069US6994748B2Method and apparatus for measuring melt levelKOMATSU DENSHI KINZOKU KK·Filed 2001·Granted Feb 7, 2006·8 cites·6 claims
- 4168US8698113B2Chamber apparatus and extreme ultraviolet (EUV) light generation apparatus including the chamber apparatusMORIYA MASATO·Filed 2011·Granted Apr 15, 2014·1 cites·4 claims
- 4268US8129700B2Optical element contamination preventing method and optical element contamination preventing device of extreme ultraviolet light sourceUENO YOSHIFUMI·Filed 2008·Granted Mar 6, 2012·7 cites·13 claims
- 4367US9325150B2Alignment system and extreme ultraviolet light generation systemMORIYA MASATO·Filed 2012·Granted Apr 26, 2016·2 cites·7 claims
- 4467US2025305879A1Spectrum measurement instrument, laser device, and method of identifying peak position of reference lightGIGAPHOTON INC·Filed 2025·Application pending·0 cites
- 4566US11384598B2Screen deviceSEIKI HANBAI CO LTD·Filed 2017·Granted Jul 12, 2022·2 cites·10 claims
- 4665US5629773AThree-dimensional image measuring deviceKOMATSU MFG CO LTD·Filed 1995·Granted May 13, 1997·20 cites·6 claims
- 4762US8742379B2Window unit, window device, laser apparatus, and extreme ultraviolet light generation systemKAMEDA HIDENOBU·Filed 2011·Granted Jun 3, 2014·2 cites·13 claims
- 4862US8316913B2Sliding screen doorCHINO MITSUHIKO·Filed 2008·Granted Nov 27, 2012·2 cites·12 claims
- 4962US2014166046A1Method and apparatus for cleaning collector mirror in euv light generatorGIGAPHOTON INC·Filed 2013·Application pending·0 cites
- 5061US8692220B2Extreme ultraviolet light source device and control method for extreme ultraviolet light source deviceGIGAPHOTON INC·Filed 2013·Granted Apr 8, 2014·1 cites·11 claims
Showing the top 50 of 88 patent records by PatentIndex Score.
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