Inventor · disambiguated record

Rainer Butsch

Also filed as: BUTSCH RAINER

3 granted patents·45 citations·filing 1996–1997

69Inventor score

Technology areasH01J

Files withIBM3

Top patents by PatentIndex Score

3 records

0172US5798528ACorrection of pattern dependent position errors in electron beam lithographyIBM·Filed 1997·Granted Aug 25, 1998·28 cites·21 claims
0260US5916716AEmulation methodology for critical dimension control in E-Beam lithographyIBM·Filed 1997·Granted Jun 29, 1999·16 cites·15 claims
0330US5838013AMethod for monitoring resist charging in a charged particle systemIBM·Filed 1996·Granted Nov 17, 1998·1 cites·26 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →