Inventor · disambiguated record
Roger B. Lachenbruch
Also filed as: LACHENBRUCH ROGER · LACHENBRUCH ROGER B
8 granted patents·768 citations·filing 1984–2002
91Inventor score
Top patents by PatentIndex Score
8 records- 0195US4790258AMagnetically coupled wafer lift pinsTEGAL CORP·Filed 1987·Granted Dec 13, 1988·420 cites·5 claims
- 0289US4724510AElectrostatic wafer clampTEGAL CORP·Filed 1986·Granted Feb 9, 1988·89 cites·5 claims
- 0388US4786359AXenon enhanced plasma etchTEGAL CORP·Filed 1987·Granted Nov 22, 1988·87 cites·5 claims
- 0481US7111467B2Ultra-low temperature closed-loop recirculating gas chilling systemBROOKS AUTOMATION INC·Filed 2002·Granted Sep 26, 2006·36 cites·27 claims
- 0576US4801241AModular article processing machine and method of article handling thereinTEGAL CORP·Filed 1984·Granted Jan 31, 1989·42 cites·2 claims
- 0675US6772825B2Heat exchange support surfaceFiled 2002·Granted Aug 10, 2004·61 cites·27 claims
- 0768US4619573AArticle transport apparatusTEGAL CORP·Filed 1984·Granted Oct 28, 1986·32 cites·5 claims
- 0830US4547248AAutomatic shutoff valveTEGAL CORP·Filed 1984·Granted Oct 15, 1985·1 cites·4 claims
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