Inventor · disambiguated record
Elisabeth Corinne Rodenburg
Also filed as: RODENBURG ELISABETH C · RODENBURG ELISABETH CORINNE
19 granted patents·3 pending applications·91 citations·filing 2007–2025
95Inventor score
Top patents by PatentIndex Score
22 records- 0199US11960213B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2023·Granted Apr 16, 2024·2 cites·20 claims
- 0299US11628498B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2022·Granted Apr 18, 2023·3 cites·20 claims
- 0399US11376663B2Substrate holder and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2020·Granted Jul 5, 2022·4 cites·20 claims
- 0499US11235388B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2020·Granted Feb 1, 2022·4 cites·21 claims
- 0598US10245641B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2016·Granted Apr 2, 2019·11 cites·20 claims
- 0697US10898955B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2019·Granted Jan 26, 2021·7 cites·20 claims
- 0797US9737934B2Substrate holder and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2016·Granted Aug 22, 2017·9 cites·20 claims
- 0897US9507274B2Substrate holder and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2013·Granted Nov 29, 2016·14 cites·20 claims
- 0997US9442395B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2013·Granted Sep 13, 2016·20 cites·20 claims
- 1096US11754929B2Substrate holder and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2022·Granted Sep 12, 2023·1 cites·20 claims
- 1193US10875096B2Substrate holder and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2017·Granted Dec 29, 2020·2 cites·33 claims
- 1292US12366808B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2024·Granted Jul 22, 2025·0 cites·20 claims
- 1391US2025341784A1Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2025·Application pending·0 cites
- 1489US12353139B2Substrate holder and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2023·Granted Jul 8, 2025·0 cites·20 claims
- 1589US2025306471A1Substrate holder and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2025·Application pending·0 cites
- 1684US9316927B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderLAFARRE RAYMOND WILHELMUS LOUIS·Filed 2012·Granted Apr 19, 2016·3 cites·20 claims
- 1782US9256139B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderLAFARRE RAYMOND WILHELMUS LOUIS·Filed 2012·Granted Feb 9, 2016·3 cites·20 claims
- 1870US10018924B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2016·Granted Jul 10, 2018·1 cites·20 claims
- 1968US8138087B2Method of manufacturing an integrated circuitMOREL STEPHANE·Filed 2007·Granted Mar 20, 2012·7 cites·14 claims
- 2063US10126663B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2017·Granted Nov 13, 2018·0 cites·20 claims
- 2154US9829803B2Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2016·Granted Nov 28, 2017·0 cites·20 claims
- 2242US2015124234A1Substrate holder, lithographic apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →