Inventor · disambiguated record
Volker Tegeder
Also filed as: TEGEDER VOLKER
5 granted patents·1 pending application·49 citations·filing 1995–2004
79Inventor score
Files withFRAUNHOFER GES FORSCHUNG1INFINEON TECHNOLOGIES AG1INFINEON TECHNOLOGIES SC3001MOTOROLA INC1PACESETTER AB1
Top patents by PatentIndex Score
6 records- 0171US6884639B2Semiconductor wafer podINFINEON TECHNOLOGIES AG·Filed 2002·Granted Apr 26, 2005·18 cites·21 claims
- 0267US6745637B2Self-supporting adaptable metrology deviceINFINEON TECHNOLOGIES SC300·Filed 2002·Granted Jun 8, 2004·13 cites·22 claims
- 0361US6732855B1Conveying element and conveyor means for conveying wafer receptacles, and methodMOTOROLA INC·Filed 2000·Granted May 11, 2004·9 cites·11 claims
- 0443US6784445B2Apparatus for monitoring intentional or unavoidable layer depositions and methodFRAUNHOFER GES FORSCHUNG·Filed 2001·Granted Aug 31, 2004·1 cites·48 claims
- 0535US2004253824A1Arrangement for monitoring a thickness of a layer depositing on a sidewall of a processing chamberFiled 2004·Application pending·0 cites
- 0627US5632085AMethod for making an electrical contact for a vitreous carbon electrodePACESETTER AB·Filed 1995·Granted May 27, 1997·8 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →