Inventor · disambiguated record
Chung-Yang Tseng
Also filed as: TSENG CHUNG-YANG
2 granted patents·12 citations·filing 2002–2003
50Inventor score
Technology areasH10P
Files withASIA PACIFIC MICROSYSTEMS INC2
Top patents by PatentIndex Score
2 records- 0159US6967145B2Method of maintaining photolithographic precision alignment after wafer bonding processASIA PACIFIC MICROSYSTEMS INC·Filed 2003·Granted Nov 22, 2005·12 cites·4 claims
- 0231US6864176B2Fabrication process for bonded wafer precision layer thickness control and its non-destructive measurement methodASIA PACIFIC MICROSYSTEMS INC·Filed 2002·Granted Mar 8, 2005·0 cites·8 claims
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