Inventor · disambiguated record

Kirill Y. Sobolev

Also filed as: SOBOLEV KIRILL Y

1 granted patent·8 citations·filing 2007–2007

30Inventor score

Technology areasG03F

Files withASML HOLDING NV1

Top patents by PatentIndex Score

1 record

0178US7965378B2Optical system and method for illumination of reflective spatial light modulators in maskless lithographyASML HOLDING NV·Filed 2007·Granted Jun 21, 2011·8 cites·1 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →