Inventor · disambiguated record
Yuri Barsukov
Also filed as: BARSUKOV YURI · BARSUKOV YURI VLADIMIROVICH
2 granted patents·1 pending application·2 citations·filing 2017–2022
35Inventor score
Top patents by PatentIndex Score
3 records- 0174US10249485B2Pulsed plasma analyzer and method for analyzing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted Apr 2, 2019·2 cites·19 claims
- 0256US2023287022A1Non-Halide Oxygen-Free Organometallic Precursors for ALD/CVD of MetallizationAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 0343US10418250B2Etching method using remote plasma source, and method of fabricating semiconductor device including the etching methodSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Sep 17, 2019·0 cites·17 claims
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