Inventor · disambiguated record
Marcel Hendrikus Maria Beems
Also filed as: BEEMS MARCEL H M · BEEMS MARCEL HENDRIKUS M · BEEMS MARCEL HENDRIKUS MARIA
17 granted patents·1 pending application·393 citations·filing 2001–2018
93Inventor score
Files withASML NETHERLANDS BV14AGILENT TECHNOLOGIES INC2DE JONG FREDERIK EDUARD1DEN BOEF ARIE JEFFREY1
Top patents by PatentIndex Score
18 records- 0196US8593646B2Measuring method, measuring apparatus, lithographic apparatus and device manufacturing methodDEN BOEF ARIE JEFFREY·Filed 2012·Granted Nov 26, 2013·30 cites·18 claims
- 0296US7405811B2Lithographic apparatus and positioning apparatusASML NETHERLANDS BV·Filed 2005·Granted Jul 29, 2008·136 cites·35 claims
- 0396US7349069B2Lithographic apparatus and positioning apparatusASML NETHERLANDS BV·Filed 2005·Granted Mar 25, 2008·146 cites·33 claims
- 0483US6853440B1Position correction in Y of mask object shift due to Z offset and non-perpendicular illuminationASML NETHERLANDS BV·Filed 2003·Granted Feb 8, 2005·20 cites·20 claims
- 0580US6747729B2Lithographic projection apparatus, device manufacturing method, device manufactured thereby and gas compositionASML NETHERLANDS BV·Filed 2001·Granted Jun 8, 2004·20 cites·31 claims
- 0674US7265366B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Sep 4, 2007·12 cites·32 claims
- 0773US8514365B2Lithographic apparatus and device manufacturing methodDE JONG FREDERIK EDUARD·Filed 2007·Granted Aug 20, 2013·5 cites·20 claims
- 0867US6536736B2Optomechanical mount for precisely steering/positioning a light beamAGILENT TECHNOLOGIES INC·Filed 2001·Granted Mar 25, 2003·10 cites·18 claims
- 0961US6570721B2Optomechanical mount for precisely steering/positioning a light beamAGILENT TECHNOLOGIES INC·Filed 2001·Granted May 27, 2003·7 cites·3 claims
- 1056US7349072B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Mar 25, 2008·4 cites·6 claims
- 1155US10809631B2Method of monitoring and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Oct 20, 2020·0 cites·21 claims
- 1251US7443511B2Integrated plane mirror and differential plane mirror interferometer systemASML NETHERLANDS BV·Filed 2003·Granted Oct 28, 2008·2 cites·24 claims
- 1342US7978339B2Lithographic apparatus temperature compensationASML NETHERLANDS BV·Filed 2005·Granted Jul 12, 2011·0 cites·5 claims
- 1441US7474409B2Lithographic interferometer system with an absolute measurement subsystem and differential measurement subsystem and method thereofASML NETHERLANDS BV·Filed 2004·Granted Jan 6, 2009·0 cites·39 claims
- 1541US7352473B2Lithographic apparatus, device manufacturing method, and computer programASML NETHERLANDS BV·Filed 2004·Granted Apr 1, 2008·1 cites·20 claims
- 1640US2005128461A1Lithographic apparatus and device manufacturing method, and measurement systemsASML NETHERLANDS BV·Filed 2004·Application pending·0 cites
- 1736US10527957B2Method and apparatus for processing a substrate in a lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted Jan 7, 2020·0 cites·13 claims
- 1834US7177059B2Device and method for manipulation and routing of a metrology beamASML NETHERLANDS BV·Filed 2004·Granted Feb 13, 2007·0 cites·15 claims
Join the waitlist — get patent alerts
Get an alert when Marcel Hendrikus Maria Beems files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →