Inventor · disambiguated record
Shunichi Kawasaki
Also filed as: KAWASAKI SHUNICHI
4 granted patents·5 citations·filing 1989–2020
61Inventor score
Top patents by PatentIndex Score
4 records- 0183US11211229B2Processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Dec 28, 2021·2 cites·5 claims
- 0246US11721595B2Processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Aug 8, 2023·0 cites·8 claims
- 0345US11610766B2Target object processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Mar 21, 2023·0 cites·16 claims
- 0426US5038270AMethod for controlling reactor systemMITSUBISHI CHEM IND·Filed 1989·Granted Aug 6, 1991·3 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →