Inventor · disambiguated record
Thomas G. Jewell
Also filed as: JEWELL THOMAS · JEWELL THOMAS G
5 granted patents·596 citations·filing 2011–2020
83Inventor score
Top patents by PatentIndex Score
5 records- 0197US8728956B2Plasma activated conformal film depositionLAVOIE ADRIEN·Filed 2011·Granted May 20, 2014·541 cites·39 claims
- 0296US9230800B2Plasma activated conformal film depositionNOVELLUS SYSTEMS INC·Filed 2014·Granted Jan 5, 2016·41 cites·22 claims
- 0393US11028482B2Use of voltage and current measurements to control dual zone ceramic pedestalsLAM RES CORP·Filed 2020·Granted Jun 8, 2021·3 cites·13 claims
- 0486US10633742B2Use of voltage and current measurements to control dual zone ceramic pedestalsLAM RES CORP·Filed 2018·Granted Apr 28, 2020·6 cites·13 claims
- 0574US8985152B2Point of use valve manifold for semiconductor fabrication equipmentCHANDRASEKHARAN RAMESH·Filed 2012·Granted Mar 24, 2015·5 cites·30 claims
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